Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ1210 13-/22-MXQ1220 13-/22-MXQ1230 13-/22-MXQ1240 13-/22-MXQ1250 13-/22-MXQ1275 13-/22-MXQ12-100 Note) Note) 1322Note) Refer to the bottom

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ12-10Z 28 17 17 11 32 32 46 11 32 82.5 4 2 62.5 75 MXQ12-20Z 28 19 19 11 32 32 48 13 32 92.5 4 2 64.5 77 MXQ12-30Z 38 21 21 11 40 40 58 15 40 102.5 4 2 74.5 87 MXQ12-40Z 34 40 27 39 60 23 50 120.5 6 3 92.5 105 MXQ12-50Z 34 11 50 37 39 39 60 23 60 130.5 6 3 102.5 115 MXQ12-75Z 36 25 61 41 36 72 100 42 85 174.5 8 4 146.5 159 MXQ12

Air Slide Table Series MXQ

-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120 0 20 40 60 80 100 20 40 60 80 100 Load N (1N

Slide Tables MX Series

Bolts used Max. tightening torque N.m{kgf.cm} Max. screw-in depth ( l mm) Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 0.9{9.2} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 5 6 8 10 13 15 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 With shock absorber Caution The product temperature may rise above the range of usage limit by radiant heat if the heat source is in the area.

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

NCG/CG1

13 13 13 13 16 20 20 0.25 stroke (13) (22.5) 10(12) 26.7 119 (13) (25) 10(12) 30.2 121 (13) (25) 10(12) 34.6 139 13 40.6 162 13 47.1 162 The minimum stroke with rod boot is 20 mm.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

CATALOG

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20