Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ1610 13-/22-MXQ1620 13-/22-MXQ1630 13-/22-MXQ1640 13-/22-MXQ1650 13-/22-MXQ1675 13-/22-MXQ16-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813

Air Slide Table

(Shock absorber only) MXQ6(A) 29.9 16 3 14 3 10 RJ0603N MXQ8(A, C) MXQ6B 29.9 15 3 13 2.2 10 MXQ12(A, C) MXQ8B 47.3 29 15 29 13 11 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 14 30 13 13 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 8 26 9 13 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 24 45 24 18 RJ1410U-X2300 For the MXQ6(A, B) and MXQ8(A, C), only the adjustment nut is long.

Air Slide Table Series MXQ

F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

Slide Tables MX Series

Bolts used Max. tightening torque N.m{kgf.cm} Max. screw-in depth ( l mm) Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 0.9{9.2} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 5 6 8 10 13 15 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 With shock absorber Caution The product temperature may rise above the range of usage limit by radiant heat if the heat source is in the area.

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

CATALOG

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

NCQ8

L M9NL 197in (5 m) .

Table of Contents

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-18 19 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Model/Specifications Nominal size 15 10 Action Double acting External grip 7 13 Holding force (N) (Effective value) (1) at 0.5 MPa Internal grip 12 6.5 Finger closing