1

18 or less 18 or less 24 or less 24 or less 12 or less 12 or less 30 or less 28 or less 35 or less 53 or less 39 or less 19 or less 16 or less 47 or less 39 or less 54 or less 15 or less 15 or less 13 or less 13 or less 18 or less 18 or less 19 or less 25 or less 25 or less 13 or less 13 or less 28 or less 25 or less 35 or less 52 or less 43 or less 17 or less 16 or less 46 or less 38 or

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

MXQ

-10 MXQ20-20 MXQ20-30 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-75 MXQ20-40 0.12 MXQ20-40 MXQ20-40 MXQ20-40 MXQ20-150 MXQ20-150 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150

Air Slide Table Series MXQ

100 200 300 150 150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air

smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Slide Tables MX Series

Bolts used Max. tightening torque N.m{kgf.cm} Max. screw-in depth ( l mm) Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 0.9{9.2} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 5 6 8 10 13 15 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 With shock absorber Caution The product temperature may rise above the range of usage limit by radiant heat if the heat source is in the area.

CATALOG

M3x0.5 1.5 25.5 20-0.052~0 16 23.5 8 8 29 5.5 38 6 3.5 20 3.5 13 5.4 8-32 5~30 M4x0.7 1.5 27 13-0.043~0 20 27.5 7 10 36 5.5 47 8 4.5 25.5 5.5 17 7 10-32 5~30 M5x0.8 5.5 32 15-0.043~0 25 30.5 12 12 40 5.5 52 10 5 28 5.5 19 10 1/4-28UNF 5~30 M6x1 2 35.5 28-0.052~0 40 29.5 13 16 52 8 69 14 7 40 5.5 9 Depth7 1/8 2 11 57 18 18.3 3/85~50 5 M8x 2 36.5 39.5 24UNF 75, 100 1.25 46.5 35-0.062~0 50

A

M3x0.5 1.5 25.5 20-0.052~0 16 23.5 8 8 29 5.5 38 6 3.5 20 3.5 13 5.4 8-32 5~30 M4x0.7 1.5 27 13-0.043~0 20 27.5 7 10 36 5.5 47 8 4.5 25.5 5.5 17 7 10-32 5~30 M5x0.8 5.5 32 15-0.043~0 25 30.5 12 12 40 5.5 52 10 5 28 5.5 19 10 1/4-28UNF 5~30 M6x1 2 35.5 28-0.052~0 40 29.5 13 16 52 8 69 14 7 40 5.5 9 Depth7 1/8 2 11 57 18 18.3 3/85~50 5 M8x 2 36.5 39.5 24UNF 75, 100 1.25 46.5 35-0.062~0 50

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

2

IDF-TB405 12 630 600 IDF22E-20 773 70 805 IDF37E-30 IDF-TB406 710 680 13 675 IDF37E-20 943 IDF55E-30 437 IDF-TB409 730 750 60 925 15 397 1043 IDF75E-30 437 IDU-TB/Dimensions (mm) Unit weight (kg) Applicable air dryer Part no.

Table of Contents

20 25 32 40 Stroke range D41 13 30 8 5 15.5 10 65.3 18 24 9 28 Up to 300 15 13 5 M8 x 1.25 20 0 0.033 45 13 30 10 5.5 19.5 10 70.5 22 30 9 33.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 -X 45 13 30 12 5.5 19.5 10 76.5 22 34.5 9 37.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 50 16 39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm)

ZP

13) ZPT16 ZPT20 (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) (8.5) 15 (8) 16 (17) (16) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable

Table of Contents

) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29)

Table of Contents

30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Hydraulic

22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19 16 M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125