MXQ

-10 MXQ20L-20 MXQ20L-30 MXQ20L-40 MXQ20L-50 MXQ20L-75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50. 8-5-34 35 Air Slide Table Series MXQ With shock absorber (20): MXQ20L-BS/BT/B Stroke Adjustable Range (mm) MX 16 Maximum 54 13 0.5 Max. 35 Extension end 35 Retraction end 35 0.5 MTS 46.5 46.5 Shock absorber at retraction end Shock absorber at extension

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13-/22-MXQ20L20 13-/22-MXQ20L30 13-/22-MXQ20L40 13-/22-MXQ20L50 13-/22-MXQ20L75 13-/22-MXQ20L-100 13-/22-MXQ20L-125 13-/22-MXQ20L-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20L-50. 819 MXQ 1322Air Slide Table Dimensions: MXQ20L / Symmetric Type 1322Axial piping (20): MXQ20L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

1

Calculation: Example) CJ2L10-45Z OBasic weight 22 (10) OAdditional weight 4/15 stroke OCylinder stroke 45 stroke OMounting bracket weight 8 (Axial foot) 22 + 4/15 x 45 + 8 = 42 g Single foot 8 8 25 8 25 Double foot 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 13 5 13 Mounting bracket weight CJ2 Single knuckle joint 17 23 17 23 Double knuckle joint (including knuckle pin) 25 21 25

XL

13 25 Series XLH Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Flange size 16 25 40 50 Heater combination table Setting temperature Symbol Model XLH-16 XLH-25 XLH-40 XLH-50 80C (176F) H1 100C (212F) H2 120C (248F) H3

High Vacuum Angle Valve, XL Series

13 25 Series XLH Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Flange size 16 25 40 50 Heater combination table Setting temperature Symbol Model XLH-16 XLH-25 XLH-40 XLH-50 80C (176F) H1 100C (212F) H2 120C (248F) H3

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XA24 XA1/2/13 to 16 Combination Applicable size Shaft type S Symbol Description Y W X6 Shaft, Bolt, Parallel key stainless specification. 30 to 100 Heat resistance (100C) X7 X10 Angle adjustment for both sides 50 to 100 X11 Angle adjustment for single side, Air cushion with single side X16 Fluoro rubber for seals 30 to 100 Chart 7.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XA24 XA1/2/13 to 16 Combination Applicable size Shaft type S Symbol Description Y W X6 Shaft, Bolt, Parallel key stainless specification. 30 to 100 Heat resistance (100C) X7 X10 Angle adjustment for both sides 50 to 100 X11 Angle adjustment for single side, Air cushion with single side X16 Fluoro rubber for seals 30 to 100 Chart 7.

Table of Contents

Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted. Tempered glass Replacement Parts AFF11B Model No.

Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Fluoropolymer Tubing Variations

(mm) TLM0201 2 x 1 2 1 TLM0302 3 x 2 3 2 TLM0425 4 x 2.5 4 2.5 TLM0403 4 x 3 4 3 TLM0604 6 x 4 6 4 TLM0806 8 x 6 8 6 TLM1075 10 x 7.5 10 7.5 TLM1008 10 x 8 10 8 TLM1209 12 x 9 12 9 TLM1210 12 x 10 12 10 TLM1916 19 x 16 19 16 TLM2522 25 x 22 25 22 TLM1613 16 x 13 16 13 Length per roll Color Translucent Translucent Symbol N N R BU B N N N 10 m Red (Translucent) 20 m Blue (Translucent) Roll

Made to Order

CG1(K)R series Width across flats B2 Width across flats MA MI MM2 H2 MK Stroke MT ML + Adjustment MH + Stroke + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) CG1(K)R Series (mm) B2 10 13 13 17 19 19 H2 3.6 5 5 6 8 8 MA 12 17 17 19 24 24 MH 38 41 41 47 60 60 MI 14 20 20 25 32 32 MK 7 9 9 10 13 13 ML 18 18 18 24 32 32 MM2 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.25 M14 x

1

20 13 31 Dimensional Range Not Possible to Machine Additionally B C D A B C D A 91 16 Bore (mm) 20 25 32 40 50 Bore (mm) 20 25 32 40 23 13 31 D LX Model MXH6 MXH10 MXH16 MXH20 18 10 28 12 18 10 28 16 114 20 29 19 36 11 27 23 13 36 13 23 13 36 20 132 25 34 19 44 15.2 32 23 13 36 16 23 13 36 20 156 30 38 19 44 20 38 27 15 42 20 27 15 42 25 186 35 44 26 58 26 43 33 19 52 25 214 40 49 26 64

Cylinder with Lock

152 4 13 13 32.5 M6 x 1 10 10 3.5 4 4 4 7 7 26 248 40 Up to 1000 3 M12 x 1.25 17 13 171 4 13 14 38 M6 x 1 13 13 4.5 4 5 7 8.9 1.8 30 279 50 Up to 1000 4 M16 x 1.5 24 14 181 5 14 14 46.5 M8 x 1.25 17 17 4.5 4 6 6 5.1 2 37 319 63 Up to 1000 4 M16 x 1.5 24 14 200.5 5 14 16 56.5 M8 x 1.25 17 17 5.5 4 9 9 6.3 2 37 338.5 80 Up to 1000 5 M20 x 1.5 30 20 238 20 16 72 M10 x 1.5 22 22 7.5 4 11.5

HRX-OM-W060

Indication Item Output Setting, selection and display CH1 circulating fluid temperature 0C to 100C: 0 to 10 V CH2 circulating fluid Analog temperature 0C to 100C: 0 to 10 V (1) Analog output signal 1 Output 1 CH2 electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid temperature 0C to 100C: 0 to 10 V Analog CH2 circulating fluid temperature 0C to 100C: 0 to 10 V (2

10

13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

HRX-OM-W069

Indication Item Output Setting, selection and display CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V CH2 circulating fluid Analog discharge temperature 0C to 100C: 0 to 10.0 V (1) Analog output signal 1 Output 1 CH2 circulating fluid electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid discharge temperature 0C to 100C: 0 to 10.0 V Analog CH2