smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

CATALOG

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6-10 13-/22-MXQ6-20 13-/22-MXQ6-30 13-/22-MXQ6-40 13-/22-MXQ6-50 Note) Note) 1322Note) Refer to the bottom view of MXQ6-30. 801 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Axial piping (6): MXQ6-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

MX-OMP0051

(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

Secondary Batteries

. : Made-to-Order Actuators Description Series 9091Remarks 91-XC4 25Standard (Double acting only) CDJ2 10, 16 CDM2 20 to 40 Standard *1 90series for 20 to 50 25series for 20 to 100 Rubber Bumper CDG1N Standard (Double acting only) Air Cylinder CDG1A 25series for 25 to 100 Air Cushion MDB 40 to 100 Standard CDA2 40 to 100 Standard *Refer to the auto switches (Front matter 13) for the models

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Table of Contents

Refer to page 3-13-4.)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

SY

SS5Y51, #3 + #13 M type plug connector .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

VFR

Refer to page 3-13-4.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.