Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: CS (Metal Stopper, Extension End)

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: Rubber Stopper, Extension End, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: Metal Stopper, Both Ends, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: Metal Stopper, Extension End, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: AS (Rubber Stopper, Extension End), Functional Option: Standard Type, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: Rubber Stopper, Extension End, Functional Option: Standard Type, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: -, Number: -

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, SLIDE TABLE, CLEAN ROOM, ACTUATOR, MXQ GUIDED CYLINDER, C5, 6MM MXQ DBL-ACT, .48733 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, SLIDE TABLE, CLEAN ROOM, ACTUATOR, MXQ GUIDED CYLINDER, C5, 6MM MXQ DBL-ACT, .41887 lb

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

1

) 3 (R) 52 22 13 32 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 25 40 30 F.O.F.* 32 N T.T. 90 Key selector (2 position) VM220-02-36A VM230-02-36A Panel mounting hole ON T.T. 40 3 1.5 OFF 39 Max. 6 38 Symbol 2 port (A) 2 21 30.5 22.1 12 10 1 (P) 1.5 R port (3 port only) 3 port (125.6) (A) 2 (104.6) 12 10 (74.1) 1 (P) 3 (R) 52 22 13 32 16 2 x 1/4 2 x 5.5 mounting hole 25 40 30 * 0.5 MPa

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6-10 13-/22-MXQ6-20 13-/22-MXQ6-30 13-/22-MXQ6-40 13-/22-MXQ6-50 Note) Note) 1322Note) Refer to the bottom view of MXQ6-30. 801 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Axial piping (6): MXQ6-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

MX-OMP0051

A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,

CATALOG

122 38 40 30 27 22 5.4 8.4 40 2.3 40 NAL3000 53 142 38 53 41 40 23 6.5 8 53 2.3 56 NAL4000 70 177 41 70 50 54 26 8.5 10.5 70 2.3 73 NAL5000 90 254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

A

32 ~300 19.5 22 20 12 18 2 12 11 38 M5x0.8 Depth 8 5.5 10 M10x1.25 36 18 71 11 10 M8x1.0 40 32 113 40 ~300 27 30 26 16 25 2 13 12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80

Secondary Batteries

, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.