MXQ

-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-40 MXQ8-40 MXQ8-10 MXQ8-10 MXQ8-10 MXQ8-30 0.005

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note) 1322Note) Refer to the bottom view of MXQ8-30. 805 MXQ 1322Air Slide Table Dimensions: MXQ8 1322Axial piping (8): MXQ8-P 1322Air Preparation Equipment Pressure Control Equipment

Air Slide Table Series MXQ

) 8 8 8 Lr = 70mm MXQ8-75 MXQ8-10 MXQ8-20 0.03 MXQ8-30 MXQ8-30 MXQ8-30 0.06 MXQ8-75 MXQ8-50 MXQ8-40 MXQ8-20 MXQ8-30 MXQ8-40 MXQ8-75 Table displacement mm Table displacement mm Table displacement mm 0.010 0.02 0.04 MXQ8-40 MXQ8-30 MXQ8-20 MXQ8-10 MXQ8-50 0.005 MXQ8-50 0.01 0.02 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N

smcmaintenancepartslist

Seal Kit List (12, 13, 18 and 20 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty.

MX-OMP0051

A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,

Table of Contents

SB) 5 3 5 90 5 90 90 20 20 20 20 AI 20 20 (3-SA) MHSHJ3-63D MHSHJ3-80D Section SD SD 4 4 10 5 11 3 5 5 3 90 5 90 20 20 20 20 (mm) NB L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 28 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5 10.5 11.5 13 14 CB 19 19 26.5 28 31 AI 54 57 70 79 93 B

CATALOG

300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20 110 M12x1.75 Depth 22 11 26 M26x1.5 100 12 108 *Trunnion mounting threads

A

18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20 110 M12x1.75 Depth 22 11 26 M26x1.5 100 12 108 *Trunnion mounting threads in flats NA are not available for 80, 100 bores

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: -, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread

type: M5 × 0.8, Auto Switches: M9BL, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

type: M5 × 0.8, Auto Switches: M9BL, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

This is a legacy product, and replaced byCHDKGB25-20-M9BL-XC62W

type: M5 × 0.8, Auto Switches: M9BL, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

type: M5 × 0.8, Auto Switches: M9BL, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: w/o Adjuster, Functional Option: Standard Type, Auto Switch: M9BV--Solid State, Gen. Purpose, 2 Wire, Vertical, Lead Wire: L (3m)