Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note) 1322Note) Refer to the bottom view of MXQ8-30. 805 MXQ 1322Air Slide Table Dimensions: MXQ8 1322Axial piping (8): MXQ8-P 1322Air Preparation Equipment Pressure Control Equipment

Air Slide Table

(Shock absorber only) MXQ6(A) 29.9 16 3 14 3 10 RJ0603N MXQ8(A, C) MXQ6B 29.9 15 3 13 2.2 10 MXQ12(A, C) MXQ8B 47.3 29 15 29 13 11 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 14 30 13 13 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 8 26 9 13 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 24 45 24 18 RJ1410U-X2300 For the MXQ6(A, B) and MXQ8(A, C), only the adjustment nut is long.

Air Slide Table Series MXQ

-75 MXQ8-10 MXQ8-20 0.03 MXQ8-30 MXQ8-30 MXQ8-30 0.06 MXQ8-75 MXQ8-50 MXQ8-40 MXQ8-20 MXQ8-30 MXQ8-40 MXQ8-75 Table displacement mm Table displacement mm Table displacement mm 0.010 0.02 0.04 MXQ8-40 MXQ8-30 MXQ8-20 MXQ8-10 MXQ8-50 0.005 MXQ8-50 0.01 0.02 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf)

smcmaintenancepartslist

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

size (mm) 15 10 5 15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

CATALOG

274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56

A

274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

20 12.5 (mm) JC JD JJ JK JU Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 70 100 200 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 53 170 18 79 34.2 75 32.5 5H9 5.5 M8 x 1.25 12.5 67 54 5H9 3.5 39 5H9 3.5 M8 x 1.25 M20 x 1.5 M10 x 1.5 M12 x 1.75 18 10 59 189 22 90 34.3 86 37.5 6H9 6.5 14.5 77 59 6H9 4.5 49 6H9 4.5 M16 x 2 M12 x 1.75 M27 x 1.5 M12 x 1.75 25 13 74 240 29 108 40.2 106 44

Table of Contents

26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204

NCQ8

L M9NL 197in (5 m) .

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.