MXS Series Air Slide Table

-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 786 MXS 1322Air Slide Table Dimensions: MXS12 1322Axial piping (12) MXS12-P 1322Maximum 6.5 Operating port 2 x M5 x 0.8 42 18.7 20 9.5 12 Other dimensions are the same as those of basic type. 787 MXS 1322Air Slide Table Dimensions: MXS12L / Symmetric Type 1322ZZ Air Preparation

SMC

-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping (12) MXS12-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment

CATALOG

121 40 6 14 M14x1.5 44 18 87 12 M10x1.25 50 139 50 7 18 M18x1.5 55 14 102 13 M12x1.25 58 162 63 7 18 M18x1.5 69 14 102 13 M14x1.5 58 162 80 11 22 M22x1.5 80 38 122 71 196 100 11 26 M26x1.5 100 12 122 71 196 **Trunnion mounting threads in flats NA are not available for 80, 100 bores.

A

121 40 6 14 M14x1.5 44 18 87 12 M10x1.25 50 139 50 7 18 M18x1.5 55 14 102 13 M12x1.25 58 162 63 7 18 M18x1.5 69 14 102 13 M14x1.5 58 162 80 11 22 M22x1.5 80 38 122 71 196 100 11 26 M26x1.5 100 12 122 71 196 **Trunnion mounting threads in flats NA are not available for 80, 100 bores.

smcmaintenancepartslist

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82 Compact Cylinder with Air Cushion Series RQ Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction 20 to 40 50 to 100 Actuators Modular F.R.L.

Slide Tables MX Series

Bolt used Max. tightening torque Nm(kgf/cm) Max. screw-in depth l (mm) Type MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} 11 13 18.5 24 29 34 M3 X 0.5 M3 X 0.5 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1 Adjuster option creates additional pinch points which can cause injury to operator when table is moving.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

100 150 Misc.

MHZ

20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 100 Overhang H (mm) 80 Pressure 0.2 MPa Pressure 0.2 MPa 60 0.3 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 40 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 12-2-13 13 Series MHZ Model Selection Confirmation of Gripping Point: Series MHZ/Internal Grip Step 2 Internal Grip Internal Grip

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.