MXS

-100 MXS12-75 MXS12-50 MXS12-75 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load

MXS Series Air Slide Table

-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 786 MXS 1322Air Slide Table Dimensions: MXS12 1322Axial piping (12) MXS12-P 1322Maximum 6.5 Operating port 2 x M5 x 0.8 42 18.7 20 9.5 12 Other dimensions are the same as those of basic type. 787 MXS 1322Air Slide Table Dimensions: MXS12L / Symmetric Type 1322ZZ Air Preparation

SMC

-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13-/22-MXS12-40 13-/22-MXS12-50 13-/22-MXS12-75 13-/22-MXS12-100 140 MXS Air slide table 1322Dimensions / MXS 12 1322Axial piping (12) MXS12-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment

CATALOG

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

A

10 40 26.5 71 70 80 MXS12-20 35 4 15 40 2 10 40 36.5 71 70 80 MXS12-30 35 4 15 40 2 10 40 46.5 71 70 80 MXS12-40 50 4 17 25 3 10 52 56.5 83 82 92 MXS12-50 35 6 15 36 3 22 60 66.5 103 102 112 MXS12-75 55 6 25 36 4 43 85 91.5 149 148 158 MXS12-100 65 6 35 38 5 52 130 116.5 203 202 212 D I M E N S I O N S S E R I E S MXS 16 Model F N G H NN I J K M Z ZZ MXS16-10 35 4 16 40 2 10 40 29 76 75 87

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

Table of Contents

Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted. Tempered glass Replacement Parts AFF11B Model No.

AFF

Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted. Tempered glass Replacement Parts AFF11B Model No.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

MGP

MGPL25-75A is selected.