SMC

-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 142 MXS Air Slide Table 1322Dimensions / MXS16 1322Basic style Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-M5 x 0.8

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 788 MXS 1322Air Slide Table Dimensions: MXS16 1322Basic 2 x M5 x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread

Bore Size: 12mm, Stroke: 10mm, Adjuster: AT (Adjuster on Retraction End)

Bore Size: 12mm, Stroke: 10mm, Adjuster: Adjuster on Retraction End, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Stroke: 10mm, Adjuster: AT (Adjuster on Retraction End), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Bore Size: 12mm, Stroke: 10mm, Adjuster: AT (Adjuster on Retraction End), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 12mm, Stroke: 10mm, Adjuster: Adjuster on Retraction End, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Stroke: 10mm, Adjuster: Adjuster on Retraction End, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

Calculation: Example) CJ2L10-45Z OBasic weight 22 (10) OAdditional weight 4/15 stroke OCylinder stroke 45 stroke OMounting bracket weight 8 (Axial foot) 22 + 4/15 x 45 + 8 = 42 g Single foot 8 8 25 8 25 Double foot 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 13 5 13 Mounting bracket weight CJ2 Single knuckle joint 17 23 17 23 Double knuckle joint (including knuckle pin) 25 21 25

Table of Contents

D-A90 cannot be mounted on Series MY1HT.

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

ISO Cylinder

10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Smooth Cylinder/Low Speed Cylinder

10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (

MY1

absorber stroke) T S F FC FB For MY1M50, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8

Table of Contents

(Refer to page 12-13-5 for contact protection box.) Most sensitive position 12-13-9 10 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Hydraulic

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) B 15 16 A 12 13 B 19 20 A 11 12 B 18 19 A 8 9 SMC D-A90 20 25 SMC D-A90 A Approx.

Air Cylinder

24 24 23 13 23 126 127 137 8 25 72 73 83 13 24 24 23 13 23 130 131 141 8 32 72 75 83 13 24 24 21 13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size