MXS

HA 40 40 40 25 36 72 76 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 125.5 179.5 3.11-31 Series MXS Dimensions MXS 16L/Symmetric style ZZ Z 0.5 36.5 Basic style 40 10 M 3.5(With stroke adjuster at extension end) 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 N -1 X F 2 21 2-M6 X 1 thread 10 deep 18 (With stroke adjuster at extension end) 20 F 4-M5 X 0.8 thread 7 deep 35

MXS Series Air Slide Table

HA 40 40 40 25 36 72 76 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 125.5 179.5 69 MXSIL Series Air Slide Table (Symmetric type) Dimensions MXS 16 L /Symmetric type ZZ Z 0.5 36.5 Basic type 40 10 M 5H9 4 deep +0.030 0 N -1 X F 2 21 2-M6 X 1 thread 10 deep 20 5H9 4 deep +0.030 0 F 4-M5 X 0.8 thread 7 deep 18 (With stroke adjuster at extension end) 35 62 48 26 6

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

Threaded type from 6A to 50A is standardized.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

1

SY3000 SY5000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 KQ2H12-17-X899 VVQ2000-51A-N7 VVQ2000-51A-N9 VVQ2000-51A-N11 SY7000 Port size 2 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Metric size

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

SX

One-touch fitting for 4 Metric size SX3000 VVQ1000-50A-C4 VVQ1000-50A-C6 One-touch fitting for 6 One-touch fitting for 4 SX5000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" Inch size Fitting assembly SX3000 VVQ1000-50A-N3 VVQ1000-50A-N7 One-touch fitting for 1/4" One-touch fitting for 5/32" SX5000 VVQ1000-51A-N3 VVQ1000

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

SY

SS5Y51, #3 + #13 M type plug connector .

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.

0.4

VQC1000 VQC2000 [SOL.A] () Applicable tubing 3.2 VVQ1000-50A-C3 COM (+) Applicable tubing 4 VVQ1000-51A-C4 VVQ1000-50A-C4 LED (Green) Coil LED Coil Applicable tubing 6 VVQ1000-51A-C6 VVQ1000-50A-C6 COM (+) [SOL.A] () Applicable tubing 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 Coil LED (Orange) Applicable tubing 1/8" VVQ1000-50A-N1 [SOL.B] () Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable tubing 1/4" Applicable

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism With surge absorbing mechanism (surge absorbing diode) mechanism Note) A-side energized: Light (orange) ON B-side

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to pages 13 to 24 for details. Stainless Steel Brass Aluminum Stainless Steel Brass Normally Closed (N.C.) Normally Closed (N.C.)