MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

SMC

-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 146 MXS Air slide table 1322Dimensions / MXS 20 1322Axial piping (20) MXS20-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 792 MXS 1322Air Slide Table Dimensions: MXS 20 1322Axial piping (20) MXS20-P 132265.7 Maximum 11.5 29.5 Operating port 2 x Rc, G, NPT1/8 32 15 20 Other dimensions are the same as those of basic type. 793 MXS 1322Air Slide Table Dimensions: MXS20L

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

CATALOG

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

A

12 47 M6x1 Depth 12 6 14 M14x1.5 44 18 78 12 10 M10x1.25 50 40 130 50 ~300 32 35 32 20 30 2 14 13 58 M8x1.25 Depth 16 7 18 M18x1.5 55 14 90 13 12 M12x1.25 50 150 58 63 150 58 63 ~300 32 35 38 20 32 2 14 13 72 M10x1.5 Depth 16 7 18 M18x1.5 69 14 90 13 12 M14x1.5 80 182 71 80 ~300 37 40 50 25 40 3 20 20 89 M10x1.5 Depth 22 11 22 M22x1.5 80 38 108 100 182 71 100 ~300 37 40 60 30 50 3 20 20

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

150 151 Construction.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.