smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

MXQ

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 33 31 70 60 3 30 1.5 17.5 35 30 5H9 depth 5 +0.030 0 F 7 4-M5 x 0.8 thread depth 8 2 N -1 x F 27 18 3-M6 x 1 thread depth 13 NA-M6 x 1 thread depth 6 13 M 5H9 depth 5 +0.030 0 25 KA Bottom view of MXQ6-30 12 6.5 36 48 25 K 12 12 6.5 41.5 0.5 6.5 46 Z ZZ (NN-1) x H G H 26 10.5 26 A B 10.5 5.1 5.1

MXS

30 76 46 58 FF 22.5 5H9 5 deep +0.030 0 F 25 5H9 5 deep +0.030 0 N -1 X F 2 27 2-M6 X 1 thread 13 deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 5H9 5 deep +0.030 0 30 1.5 NN-M6 X 1 thread 12 deep A B 6 Cross section AA Cross section BB 5H9 5 deep +0.030 0 HA GA With auto switch Basic style MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 VWith

MXS Series Air Slide Table

MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 169 223 275 62 Air Slide Table MXS Series Dimensions MXS 20 With shock absorber (20) MXS20BS, BT, B 47.5 34 A 12 48 24.5 70 24.5 (mm) Stroke adjustable range Retracting 5 15 25 35 30 15 35 35 35 A dimension (Retracted side mounting) Extending Model MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125

CATALOG

M3x0.5 1.5 25.5 20-0.052~0 16 23.5 8 8 29 5.5 38 6 3.5 20 3.5 13 5.4 8-32 5~30 M4x0.7 1.5 27 13-0.043~0 20 27.5 7 10 36 5.5 47 8 4.5 25.5 5.5 17 7 10-32 5~30 M5x0.8 5.5 32 15-0.043~0 25 30.5 12 12 40 5.5 52 10 5 28 5.5 19 10 1/4-28UNF 5~30 M6x1 2 35.5 28-0.052~0 40 29.5 13 16 52 8 69 14 7 40 5.5 9 Depth7 1/8 2 11 57 18 18.3 3/85~50 5 M8x 2 36.5 39.5 24UNF 75, 100 1.25 46.5 35-0.062~0 50

A

M3x0.5 1.5 25.5 20-0.052~0 16 23.5 8 8 29 5.5 38 6 3.5 20 3.5 13 5.4 8-32 5~30 M4x0.7 1.5 27 13-0.043~0 20 27.5 7 10 36 5.5 47 8 4.5 25.5 5.5 17 7 10-32 5~30 M5x0.8 5.5 32 15-0.043~0 25 30.5 12 12 40 5.5 52 10 5 28 5.5 19 10 1/4-28UNF 5~30 M6x1 2 35.5 28-0.052~0 40 29.5 13 16 52 8 69 14 7 40 5.5 9 Depth7 1/8 2 11 57 18 18.3 3/85~50 5 M8x 2 36.5 39.5 24UNF 75, 100 1.25 46.5 35-0.062~0 50

Slide Tables MX Series

Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4

SMC Pneumatic Clean Series

x 1.25 M8 x 1.25 15 11.5 10.5 8.5 40 32 25 20 11 8 8 8 36 31 31 31 16 13 13 13 37 42.5 34.5 30 24 47.3 37 37 30 108 82 80 80 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

1

18 or less 18 or less 24 or less 24 or less 12 or less 12 or less 30 or less 28 or less 35 or less 53 or less 39 or less 19 or less 16 or less 47 or less 39 or less 54 or less 15 or less 15 or less 13 or less 13 or less 18 or less 18 or less 19 or less 25 or less 25 or less 13 or less 13 or less 28 or less 25 or less 35 or less 52 or less 43 or less 17 or less 16 or less 46 or less 38 or

Table of Contents

Grommet D-F7NV/F7PV/F7BV 12-13-13 Rail D-J79C Connector 12-13-14 DD-F59/F5P/J51/J59 Grommet 20D-S991/S992/S99V1/S99V2 D-T991/T992/T99V1/T99V2 D-S9P1/S9P2/S9PV1/S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Table of Contents

20 25 32 40 Stroke range D41 13 30 8 5 15.5 10 65.3 18 24 9 28 Up to 300 15 13 5 M8 x 1.25 20 0 0.033 45 13 30 10 5.5 19.5 10 70.5 22 30 9 33.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 -X 45 13 30 12 5.5 19.5 10 76.5 22 34.5 9 37.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 50 16 39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm)

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

ISO Cylinder

10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

Smooth Cylinder/Low Speed Cylinder

flats KA NA L S + Stroke RR ZZ + Stroke Z + Stroke (mm) B1 P RR E H KA L N NA NN U A CI I Z H1 K MM S AL CD ZZ CX D F G FL Bore size (mm) 0 0.033 20 15.5 13 10.5 5 M8 x 1.25 M20 x 1.5 133 142 9 41 6 30 15 24 14 18 24 28 5 62 9 10 8 13 8 20 0 0.033 25 33.5 5.5 M10 x 1.25 19.5 17 10.5 6 M26 x 1.5 137 146 9 45 8 30 15 30 14 22 30 62 9 10 10 13 8 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Air Cylinder

9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5