274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56
274 15 23depth17 M18x2.5depth32 85 153 190 245 Bore Size Stroke range (mm) M N O P Q R S T U V W X Y Z (mm) 20 75, 100, 125, 150, 200 25 45 M6X1depth9 1/8 21 14 26 12 86 48 36 30 80 157 25 35 54 M6X1depth13 1/8 21 14 31 13 100 57 42 37 80 175 32 35 60 M6X2depth13 1/8 21 13 38 16 114 65 48 37 82 201 75, 100, 40 50 75 M8X1.25depth16 1/8 25 14 47 20 140 84 58 44 92 238 125, 150, 200, 50 56
-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 146 MXS Air slide table 1322Dimensions / MXS 20 1322Axial piping (20) MXS20-P 1322Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control
15 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.
x 1.25 M8 x 1.25 15 11.5 10.5 8.5 40 32 25 20 11 8 8 8 36 31 31 31 16 13 13 13 37 42.5 34.5 30 24 47.3 37 37 30 108 82 80 80 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 792 MXS 1322Air Slide Table Dimensions: MXS 20 1322Axial piping (20) MXS20-P 132265.7 Maximum 11.5 29.5 Operating port 2 x Rc, G, NPT1/8 32 15 20 Other dimensions are the same as those of basic type. 793 MXS 1322Air Slide Table Dimensions: MXS20L
Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250
Tightening torque Nm{kgfcm} 3.0{29} 5.0{49} 12.5{122} 25.0{245} 43.9{430} 70.4{690} Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Tightening torque Nm{kgfcm} Model MXS 8 MXS12 1.67{17.1} MXS16 3.14{32.1} 10.8{110.2} MXS20 MXS25 1 N M = 0.7375 ft lb 13 MXS Series Air Slide Table Precautions Precautions on Functional Option With end lock With buffer mechanism Caution Caution 1.2 position, 4
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
st 76 to 100 st 101 to 125 st 126 to 150 st 6 12 21 25 39 5.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 13 20.5 32.5 44.5 6 CJ2 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CG1 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 MB 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CA2 D-A9lV 10
M6 x 1 37 25 MY1H32 49 64 50 Rc 1/8 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.
Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95
26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204
FL A B2 C2 D H2 I FD AL E F FT B FX B1 FY FZ G H H1 Bore size (mm) 20 13 26 30 5 8 10.5 18 8 28 7 15.5 13 4 34 60 75 8 0 0.033 41 20 25 17 32 37 6 8 10.5 22 10 33.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 32 17 32 37 6 8 10.5 22 12 37.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 40 22 41 47.3 8 10 13.5 24 14 46.5 7 21 16 5 52 66 36 82 0 0.039 11 50 32 (mm) P S KA N Z NA ZZ NN K MM Bore size (mm
size (mm) 15 10 5 15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the
26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10
(mm) ZZ + Stroke H Bore size A AL B B1 B2 C2 D E F FL FD FT FX FY FZ G H H1 H2 I K KA MM NA NN P S Z ZZ 20 18 15.5 34 13 26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 D25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8
162 23 12.5 80 119.5 53.5 18 101.5 10 27 38 28 56 10 100 142 63 22 120 13 31 45 32 64 12 Double clevis bracket material: Cast iron Rod Side Flange Style Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 54 64 63.5 73.5 75 85 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) L1 N RR
53.5 74.5 20 4.5 59 7 13 23.5 118 53.5 80 80 43.5 12 63 98 86 22 6 29 71 7 13 137 53.5 100 100 Double clevis (mm) Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Y LY LZ X W/o auto switch With auto switch A 88 98 109.5 119.5 132 142 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 CD CL CT CU CW CX CZ L 9 91.5 113 16.2 63 B 36 46