smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

MXS

Cross section BB With auto switch Basic style MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 VWith stroke adjuster MXS8-10AS MXS8-20AS MXS8-30AS MXS8-40AS MXS8-50AS SMXS8A, #1 SMXS8A, #2 SMXS8A, #3(#3+#7) SMXS8B, #1 SMXS8B, #2(#2+#5) (mm) Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12

MXS Series Air Slide Table

-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 Table deflection mm Table deflection mm Table deflection mm MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 0.02 MXS8-10 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 12 12 12 Lr=65mm 0.035 0.10 0.04

SMC

20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5 x 0.8 15 6.5 12 Other dimensions are the same as those of basic style. 138 MXS Air slide table 1322Dimensions

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves

A

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 Courtesy of Steven Engineering, Inc.

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Table of Contents

Refer to page 3-13-4.)

Air Slide Table

range 16 13 Adjustment range 18 13 Adjustment range 9 Max. 30 Max. 31 Max. 26 57 58.5 52.8 * Dimensions other than those listed above are the same as those for the standard type. 43 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 20A [Functional Option] MXQ 20A-mm3 Axial piping (20) Double-ported type MXQA Pilot port M5 x 0.8 (OUT) 61 Pilot port M5 x 0.8 (IN) 5.5 Low thrust

SY

SS5Y51, #3 + #13 M type plug connector .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

VFR

Refer to page 3-13-4.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

42

Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common. VFR Special Wiring Specifications 1 VQ7 14 2 15 2. Wiring specifications Double wiring (connected to SOL. A and SOL. B) is used for the internal wiring of each station regardless of valve and option types.

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water