SMC

20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5 x 0.8 15 6.5 12 Other dimensions are the same as those of basic style. 138 MXS Air slide table 1322Dimensions

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves

CATALOG

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 MXS8-75 50 6 27 28 5 38.5 96 88.5 151

A

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 Courtesy of Steven Engineering, Inc.

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-18 19 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Model/Specifications Nominal size 15 10 Action Double acting External grip 7 13 Holding force (N) (Effective value) (1) at 0.5 MPa Internal grip 12 6.5 Finger closing

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

1

Calculation: Example) CJ2L10-45Z OBasic weight 22 (10) OAdditional weight 4/15 stroke OCylinder stroke 45 stroke OMounting bracket weight 8 (Axial foot) 22 + 4/15 x 45 + 8 = 42 g Single foot 8 8 25 8 25 Double foot 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 13 5 13 Mounting bracket weight CJ2 Single knuckle joint 17 23 17 23 Double knuckle joint (including knuckle pin) 25 21 25