Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

MXS

Cross section BB With auto switch Basic style MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 VWith stroke adjuster MXS8-10AS MXS8-20AS MXS8-30AS MXS8-40AS MXS8-50AS SMXS8A, #1 SMXS8A, #2 SMXS8A, #3(#3+#7) SMXS8B, #1 SMXS8B, #2(#2+#5) (mm) Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12

MXS Series Air Slide Table

-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 Table deflection mm Table deflection mm Table deflection mm MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 0.02 MXS8-10 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 12 12 12 Lr=65mm 0.035 0.10 0.04

SMC

20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5 x 0.8 15 6.5 12 Other dimensions are the same as those of basic style. 138 MXS Air slide table 1322Dimensions

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves

CATALOG

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 MXS8-75 50 6 27 28 5 38.5 96 88.5 151

A

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 Courtesy of Steven Engineering, Inc.

Table of Contents

Refer to page 3-13-4.)

VFR

Refer to page 3-13-4.)

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VFS4000-OMY0001

-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25

Table of Contents

Since there are other applicable auto switches than listed, refer to page 8-23-13 for details.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

Mechanical Valves Series NVM, NVFM, NVZNI

Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

IIIIIII

Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

03-ckqg_ckqp-e

CKQG-25A CKQG-R200S CKQG-30A 183

LEC-OM07605CN

STOS1EMG0 STO[AL. 63 STO] 13.

1

20 13 31 Dimensional Range Not Possible to Machine Additionally B C D A B C D A 91 16 Bore (mm) 20 25 32 40 50 Bore (mm) 20 25 32 40 23 13 31 D LX Model MXH6 MXH10 MXH16 MXH20 18 10 28 12 18 10 28 16 114 20 29 19 36 11 27 23 13 36 13 23 13 36 20 132 25 34 19 44 15.2 32 23 13 36 16 23 13 36 20 156 30 38 19 44 20 38 27 15 42 20 27 15 42 25 186 35 44 26 58 26 43 33 19 52 25 214 40 49 26 64