MXS Series Air Slide Table

-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 Table deflection mm Table deflection mm Table deflection mm MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 0.02 MXS8-10 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 12 12 12 Lr=65mm 0.035 0.10 0.04

SMC

20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5 x 0.8 15 6.5 12 Other dimensions are the same as those of basic style. 138 MXS Air slide table 1322Dimensions

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves

CATALOG

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 MXS8-75 50 6 27 28 5 38.5 96 88.5 151

A

52.5 84 83.5 90 MXS6-50 38 6 17 24 4 25 60 62.5 100 99.5 106 D I M E N S I O N S S E R I E S MXS 8 Model F N G H NN I J K M Z ZZ MXS8-10 25 4 9 28 2 13 19.5 23.5 49 48.5 56 MXS8-20 25 4 12 30 2 8.5 29 33.5 54 53.5 61 MXS8-30 40 4 13 20 3 9.5 39 43.5 65 64.5 72 MXS8-40 50 4 15 28 3 10.5 56 53.5 83 82.5 90 MXS8-50 38 6 20 23 4 24.5 60 63.5 101 100.5 108 Courtesy of Steven Engineering, Inc.

Table of Contents

12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21 Grommet Rail D-F59F Rail D-F7BAL/F7BAVL 12-13-22 Tie-rod D-F5BAL Grommet D-Y7BAL 12-13-24 Direct D-F9BAL 12-13-23 D-F7NTL Rail Grommet Tie-rod D-F5NTL Note) As for the applicable auto switches on Rotary Actuators, refer

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Table of Contents

Threaded type from 6A to 50A is standardized.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

1

SY3000 SY5000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 KQ2H12-17-X899 VVQ2000-51A-N7 VVQ2000-51A-N9 VVQ2000-51A-N11 SY7000 Port size 2 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Metric size

2/3 Port Valve

Refer to p.4.1-12, 4.1-13 for specifications and model.

SX

One-touch fitting for 4 Metric size SX3000 VVQ1000-50A-C4 VVQ1000-50A-C6 One-touch fitting for 6 One-touch fitting for 4 SX5000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" Inch size Fitting assembly SX3000 VVQ1000-50A-N3 VVQ1000-50A-N7 One-touch fitting for 1/4" One-touch fitting for 5/32" SX5000 VVQ1000-51A-N3 VVQ1000

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

SY

SS5Y51, #3 + #13 M type plug connector .

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.

0.4

VQC1000 VQC2000 [SOL.A] () Applicable tubing 3.2 VVQ1000-50A-C3 COM (+) Applicable tubing 4 VVQ1000-51A-C4 VVQ1000-50A-C4 LED (Green) Coil LED Coil Applicable tubing 6 VVQ1000-51A-C6 VVQ1000-50A-C6 COM (+) [SOL.A] () Applicable tubing 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 Coil LED (Orange) Applicable tubing 1/8" VVQ1000-50A-N1 [SOL.B] () Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable