Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

CATALOG

21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Without gaiter With gaiter size (mm) PR U CDH10 CX H Z ZZ e f h l Z ZZ 40 10 16 10+0.058 0 15.0-0.1 -0.3 51 165 175 43 11.2 59 1/4 stroke 173 183 50 12 19 12+0.070 0 18.0-0.1 -0.3 58 183 195 52 11.2 66 1/4 stroke 191 203 63 16 23 16+0.070 0 25.0-0.1 -0.3 58

ZP

Lock ring Adapter z c x Pad 165 B

ZP

Width across flat 17 (Hexagon) Buffer body (Material: Aluminum alloy) ZP100H ZP125H ZP100HB ZP125HB Width across flat 30 (Hexagon) A 50 21 ZPB-X3J25-B01 ZPB-X3J25-N01 ZPB-X3J25-T01 ZPB-X3J50-B01 ZPB-X3J50-N01 ZPB-X3J50-T01 ZPB-X3J75-B01 ZPB-X3J75-N01 ZPB-X3J75-T01 ZPB-X3J100-B01 ZPB-X3J100-N01 ZPB-X3J100-T01 8 8 (B) M22 x 1.5 Width across flat 21 (Hexagon) Dimensions Model 44 80 120 155 50

ZP

Width across flat 17 (Hexagon) Buffer body (Material: Aluminum alloy) ZP100H ZP125H ZP100HB ZP125HB Width across flat 30 (Hexagon) A 50 21 ZPB-X3J25-B01 ZPB-X3J25-N01 ZPB-X3J25-T01 ZPB-X3J50-B01 ZPB-X3J50-N01 ZPB-X3J50-T01 ZPB-X3J75-B01 ZPB-X3J75-N01 ZPB-X3J75-T01 ZPB-X3J100-B01 ZPB-X3J100-N01 ZPB-X3J100-T01 8 8 (B) M22 x 1.5 Width across flat 21 (Hexagon) Dimensions Model 44 80 120 155 50

Table of Contents

30 40 IS Pressure supply port 2 O-ring Pressure supply port 2 O-ring ZSM 6 5 . 9 6 5 . 9 30 21 21 PF2 27 27 IF 2-M2.5 x 24L Mounting threads 2-M2.5 x 24L Mounting threads Data Connector type: SE1-14C/-15C/-18C/-19C Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 I Z I Z Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L

V

Capacity H O W T O O R D E R S E R I E S (N)AK T E C H N I C A L SPECIFICATIONS B O D Y S I Z E .P O RT . . .E F F E C T I V E S I Z E NPT . . .O R I F I C E* NAQ1500-M5 .M5 . . .2.8 NAQ1510-N01...1 8 . . . .5.8 NAQ2000-N01...1 8 . . . .25 NAQ2000-N02...1 4 . . . .40 NAQ3000-N02...1 4 . . . .42 NAQ3000-N03...3 8 . . . .70 NAQ5000-N04...1 2 . . . .115 NAQ5000-N06...3 4 . . . .180 Fluid Air

Table of Contents

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Z/ISE20B) * For tubing, please use the SMC TU0425 (polyurethane, O.D. 4, I.D. 2.5) for the pressure switch.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

Micro Mechanical Valve Series VM1000

Cam and Dog Material Roller material Cam and dog material Surface finish of cam and dog Polyacetal Steel 6.3 z or less Hard steel Steel, Resin 25 z or less Caution 1.

A

M5) NAN110-N01 (1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Mechanical Valves Series NVM, NVFM, NVZNI

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

IIIIIII

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5