Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

1

32.5 44.5 6 CJ2 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CG1 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 MB 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CA2 D-A9lV 10 9 9 16.5 28.5 40.5 2 CQ2 CQS 16 8.5 8.5 17 29 41 47 71 89 101 2.5 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 1 2000r/min5s 150r/min 100 10% 2 (2) 2 21 (No.PB06) 2 No.

Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Special Applications: 10- (Clean Room Compliant), Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean Room Compliant, Size: 30, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 20, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 40, Backflow Function: Backflow Function, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: Clean-room, Copper-free, Fluorine-free, Silicon-free, Size: 20, Backflow Function: None, Thread: NPT, Port Size: 1/4, Accessory: B+G, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: Name plate & Pressure Gauge in Imperial Units: psi

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1Z (1+Z)

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: 1Z (1+Z)

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, N, "REGULATOR