42 M14x1.5 32, 40 41.6 IY-G04 30 12 14 Y-G04 36 16 22 42 M14x1.5 32, 40 0~0.070 0~0.070 14 22 -0.5 ~ -03 14 22 -0.5 ~ -03 40 16 20 I-G05 18 28 56 M18x1.5 50, 63 50.6 IY-G05 40 16 20 Y-G05 44 20 28 56 M18x1.5 50, 63 0~0.070 0~0.070 18 28 -0.5 ~ -03 18 28 -0.5 ~ -03 50 21 27 I-G08 21 38 71 M22x1.5 80 64 IY-G08 50 21 27 Y-G08 56 23 38 71 M22x1.5 80 0~0.084 0~0.084 22 32 -0.5 ~ -03 22 32 -0.5
Note 3) 5 to 50 5 to 55 Note 3) Ambient temperature (C) 5 to 50 Note 3) 5 to 50 5 to 55 Note 3) Outlet air atmospheric pressure dew point (C) performance Standard 15 Inlet air flow rate (L/min [ANR]) Note 5) 329 550 1100 665 818 28 56 111 222 Outlet air flow rate (L/min [ANR]) 300 500 1000 600 750 25 50 100 200 Purge air flow rate (L/min [ANR]) Note 6) 29 50 100 65 68 3 6 11 22 Inlet air
42 M14x1.5 32, 40 41.6 IY-G04 30 12 14 Y-G04 36 16 22 42 M14x1.5 32, 40 0~0.070 0~0.070 14 22 -0.5 ~ -03 14 22 -0.5 ~ -03 40 16 20 I-G05 18 28 56 M18x1.5 50, 63 50.6 IY-G05 40 16 20 Y-G05 44 20 28 56 M18x1.5 50, 63 0~0.070 0~0.070 18 28 -0.5 ~ -03 18 28 -0.5 ~ -03 50 21 27 I-G08 21 38 71 M22x1.5 80 64 IY-G08 50 21 27 Y-G08 56 23 38 71 M22x1.5 80 0~0.084 0~0.084 22 32 -0.5 ~ -03 22 32 -0.5
40 38.4 29 4 70.5 56 40 0.050 0.093 IY-G04SUS 50, 63 40 CG-E050SUS 10 14 Type C 10 for axis 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 0.065 0.117 IY-G05SUS 80, 100 50, 63 CG-E080SUS 14 22 Type C 14 for axis 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 IY-G08SUS 80 18 Type C 18 for axis 17 64 56.2 2.55 1.35 IY-G10SUS 100 22 Type C 22 for axis 21 72
1/4 37 15 106 50 9 25 73 53 14 23 19 20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 125 6.5
100 10 to 50 75, 100 32 CD hole H10 14 80 43 10 5 70 Axis d9 40 14 88.5 49.5 78.5 10 6 CU RR CW L CX B + Stroke 50 20 100.5 50.5 86.5 14 7 +0.4 +0.2 100.5 CZ 0.1 0.3 Bore size (mm) Stroke range (mm) CL + Stroke CX CZ N RR CW L L1 A + Stroke 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 18 36 28.5 M6 x 1.0 10 20 7 40 18 36 28.5 M6 x 1.0 10 22 7 50 22 44 33.5 M8 x 1.25 14 28 8 L1 Double
40 50, 63 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load weight m (kg) 80 20 20 10 10 5 20 50 100 200 5 20 50 100 200 Stroke (mm) Stroke (mm) 8-19-33 Series MGP Horizontal Mounting (Ball bushing bearing) (21) l = 50 mm, V = 400 m/s (22) l = 100 mm, V = 400 m/s MGPL16
59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35
) 3.5 42.5 17 22 S1 S2 5 to 30 16 (27) (52.5) (22) 3.5 42.5 17 22 20 (36) (70) (29.5) 4.5 50 19.5 26 5 to 50 25 (39) (76.5) (32.5) 5 56.5 22.5 29 Note 1) ( ): Denotes the dimensions with auto switch.
174 116 174 20 53.5 199.5 120.5 177.5 12 43.5 25, 50 113 170 192 CU CX +0.4 +0.2 22 13 31 100 214.5 22 53.5 75, 100 125.5 192.5 214.5 125.5 192.5 RR CW L B + Stroke CZ -0.1 -0.3 CL + Stroke Bore size (mm) Standard stroke CW CX CZ N RR A + Stroke 32 20 18 36 M6 x 1.0 10 Rod end male thread 40 22 18 36 M6 x 1.0 10 10, 15, 20, 25 50, 75, 100 50 28 22 44 M8 x 1.25 14 63 30 22 44 M10 x 1.5 14
Bore size (mm) E1 L1 MM R1 U1 NDH10 NX NZ I-03M 32 40 14 20 30 M10 x 1.25 12 16 10 +0.058 0 14 0.10 0.30 I-04M 40 50 19 22 40 M14 x 1.5 12.5 19 10 +0.058 0 14 0.10 0.30 I-05M 50, 63 64 24 28 50 M18 x 1.5 16.5 24 14 +0.070 0 20 0.10 0.30 I-08M 80 80 26 40 60 M22 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-10M 100 80 26 40 60 M26 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 Y-03M 32 20 30 M10 x 1.25
32, 40/5 to 100 50 to 100/10 to 100 Double rod CQ2W 2.3-22 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-38 return/extend CQ2 CU Non-rotating rod 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 Single rod CQ2K 2.3-56 CQS Double acting 12, 16, 20 25, 32, 40 50, 63 CQ2 Double rod CQ2KW 12, 16/5 to 30 20, 40/5 to 50 50
16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 74 (80) 10 46 (50) 74 (78) 12 50 (53.5) 88 (91.5) 16 50 (53.5) 65.5 (69) 81 (84.5) 88 (91.5) 103.5
213.5 487 485 497 ZP3E-TF100UMJB ZP3E-TF80UMJB Width across flats 17 Rc1/8 Width across flats 17 Rc1/8 Bushing Bushing 50 21.5 30.5 A B 50 8 8 Bushing Bushing ZP3 Width across flats 30 B Width across flats 30 M22 x 1.5 M22 x 1.5 Width across flats 22 Width across flats 22 ZP3E ZP3E A 32 61 32 50 ZP2 33 24 ZP2V 4 4 25.11) 5 22.61) 7 30 (Rotating angle) 30 (Rotating angle) ZP 83 80 103 100
2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.
108(122) 37 50 16(20) 71 89 M10 x 1.5 depth 22 10 M22 x 1.5 182(196) 22 22 80 Rc 3/8 60.5 Up to 300 301 to 1400 20 108(122) 37 60 16(20) 71 110 M12 x 1.75 depth 22 10 M26 x 1.5 182(196) 22 22 100 Rc 1/2 71 Up to 300 301 to 1500 CP95 Note) ( ): Denotes the dimensions for long stroke.
22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125
0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5
10 to 50 75,100 10 to 50 75,100 10 to 50 75,100 32 13 16 45 17 M8 x 1.25 60 10.5 14 5.5 9 depth 7 Rc 1/8 8 55.5 7 34 30 40 13 16 52 17 M8 x 1.25 69 10 14 7 40 5.5 9 depth 7 Rc 1/8 8 62 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 6.6 11 depth 8 Rc 1/4 10 77 39 50 63 15 20 77 22 M10 x 1.5 103 13 17 8 60 9 14 depth 10.5 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 11 17.5 depth 13.5 Rc 3/8
Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1 For dimensions other than listed above, refer to the dimensions with rubber