A

7 18 M18x1.5 69 14 90 18 +0.070 0 74 30 22 38 80 ~300 37 40 99.5 25 40 3 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 18 +0.070 0 28 56 35 18 50 100 ~300 37 40 120 30 50 3 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 22 +0.084 0 32 64 43 22 60 Courtesy of Steven Engineering, Inc. !

Table of Contents

82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling

Table of Contents

19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Micro Mechanical Valve Series VM1000

F.O.F. 5.8 mm 52 N 2 x 4.6 mounting hole VM220-02-30R/B/G/Y-X219 VM230-02-30R/B/G/Y-X219 40 Panel mounting hole T.T. 30.5 31 EXH port (3 port only) 1.5 1.5 0.8 to 7.5 3 29.1 Symbol (112.1) (OUT) 2 2 port (81.1) OUT 10 12 1 (IN) IN VM2 SMC 52 22 13 3 port (OUT) 2 32 10 16 12 1 (IN) 3 (EXH.) 30 25 0.5 MPa supply T.T.

VM

21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 1 2

VM

T.T. 60 Push button (Mushroom) VM220-02-30R/B/G/Y VM230-02-30R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-23 22 Series VM200 Series VM200 Push button (Extended) VM220-02-32R/B/G/Y VM230-02-32R/B/G/Y JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

MXS

22 22 22 20 26 32 40 30 KA N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 M 92 92 92 102 115 156 197 255 295 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 90.5 SMXS25A, #5(#1+#5) SMXS25A, #6(#2+#6) SMXS25A, #7

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

VM

Push Button (Mushroom)/VM220-02-30R, B, G, Y/VM230-02-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. 3.5-22 VM200 Series VM200 Push Button (Extended)/VM220-02-32R, B, G, Y/VM230-02-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Auto switch mounting groove 2 D10 2035.8 4.7 3.8 22 2-3 (76) 70 11.5 25.5 2-4.2 2 5 0 0.03 5 0 0.03 24.5 4 12 0 0.05 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) Dimensional Differences between MHR and MDHR 25 25 Regardless of auto switch installation, some body dimensions are different.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

3m.L (Example) F9BVL Refer to p.2.11-1 for auto switch specifications. 2.3-3 2 Finger Air Gripper Series MHR2/MDHR2 Model/Specifications 10 20 30 Nominal size 15 Action Double acting Holding force (N) (Effective value) (1) at 0.5MPa 12 33 58 External hold 24 12 34 59 Internal hold 25 Finger closing width (mm) Finger opening width 10 16 19 14 Opening/closing stroke (Both sides) 16 28 37 22

LEC-OM02704CN

30 L 10 B0.3 C A 3 6 0.3 -0.2 35 0 24 0 7 24 6 22 ()M4 35 11 .

LEC-OM07605CN

PB10 ] _ _ _ 3 _ _ _ 4 22 [Pr. PB08 ] [Pr. PB09 ] [Pr.

CXS

However for CXSWL15, there are two types of O-ring (22). For other sizes, one type of O-ring is available. For CXSWL6, aluminum alloy is used for 16. Note) Piston rod for CXSWL is quenched. Replacement parts: Seal kits Bore size (mm) Seal kit no.

LEC-OM02904

) [] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

Shock Absorbers and Rate Controls

t 9 60 60 241 l 2 l 48 76 0E113.()flx2 245 265 98 il85 x 2 69 76 l{0 70 J8 5l 0tlll3.0llx3.5 323 343 98 M 8 5 x 2 22 69 76 v9 90 58 7l Otlll3.0frlx5 399 419 90 M 8 5 x ? 22 69 76 2tl r09 58 7l Otl{13.0Iir6.5 494 514 98 l{85 x ? 22 8l 8l ?

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162 152 182 192 222 142 172 162 192 232 262 70 90 50 Dimensions other than those listed above are the same as for the standard type. 8-29-22 23 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Proper Auto

Clean Series: 22 [Vacuum Suction Type (Copper, Fluorine and Silicon-free + Low Particle Generation)], Magnet: D (Built-in), Mounting: B (Basic Style), Stroke: 15mm, Cushion: Rubber Bumper (Standard), Head Cover Port: R (Axial), Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire