Series MXP Precision Air Slide Table -20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series MXP Precision Air Slide Table Construction
operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5 depth 3 10.05 +0.030 0 D B 16.5 3.5 18
30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3
Type MXP8 MXP10 MXP12 MXP16 Tightening torque joint shaft 0.4 Nm 0.7 Nm 1.8 Nm 3.6 Nm Note 1) Assemble end plate so that A, B dimensions will be values on table below. (mm) A B Type MXP8 Body (Note 1) 0.2 0.2 MXP10 End plate (Note 1) MXP12 0.5 0.3 MXP16 Bolt torque 0.45 Nm Type MXP8 MXP10 MXP12 MXP16 A 0.6 Nm B 1.4 Nm 12. Remove the end plate mounting bolt on the opposite side. 13.
21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3/8 KQH11-U03 17.46 28 22 21 7 12 12 KQH12-U04 22 24.5 16.5 22 58.3 3/8 1/2 KQH11
7 18 M18x1.5 69 14 90 18 +0.070 0 74 30 22 38 80 ~300 37 40 99.5 25 40 3 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 18 +0.070 0 28 56 35 18 50 100 ~300 37 40 120 30 50 3 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 22 +0.084 0 32 64 43 22 60 Courtesy of Steven Engineering, Inc. !
CA2 B port Without auto switch With auto switch Bore size (mm) ZZ S ZZ S CS1 Stroke A Stroke B 125 334 197 334 197 140 Series CQS 334 197 334 197 C76 Bore size (mm) Stroke Both of S1, S2 160 363.5 213 363.5 213 B1 A B2 L 180 401 231 393 223 C85 12 42.5 22 (52.5) 3.5 17 (27) (22) 200 411 241 393 223 5 to 30 16 42.5 22 (52.5) 3.5 17 (27) (22) 250 484.5 283 C95 S + Stroke (A + B) 20 50 26
Specification: 22 (Copper, Flourine and Silicon Free + Low Particle Generation, Vacuum Suction Type), Bore Size: Ø16, Stroke: 30mm, Adjuster: H (Without Adjuster)
Specification: Copper, Flourine and Silicon Free + Low Particle Generation, Vacuum Suction Type, Bore Size: Ø16, Stroke: 30mm, Adjuster: Without Adjuster, Magnet: -, Auto Switch: -, Lead Wire: -, Number: -
Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.
Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.
, 50H Standard dew point 20C In the case of 15C (symbol H) type (but, except IDG30, 50, 30H, 50H) Step 6 Confirmation of pressure drop P1 [MPa] Single unit (Refer to pages 14-19-12 and 13.)
History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Jul/7/22 Record of Changes Version Contents Date 1.0 First edition Jul/7/22 HEF002-A6 i Preface Preface Thank you very much for purchasing SMC Thermo-con. This manual contains description for communication protocol of this product for your full benefit from this product.
CR ,, (EE ) 2ROM E 2ROM (100 ,E ), 2ROM E (3) : # : ASCII ,, 30H ) # 0 0 V R 23H 30H 30H 56H 52H 23H+30H+30H+56H+52H=12BH 2B ,30H 32H 3BH : # 0 0 V R 2 ; [CR] 23H 30H 30H 56H 52H 32H 3BH 0DH )ASCII ASCII 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H 30H39H 3AH 3BH 3CH 3DH 3EH 3FH 27 - (4) 1bit () bit (ON 1) b7 b6 b5 b4 b3 b2 b1 1 0 () ON () (5) VR # 0 0 V R [CR] No. #
Set temperature to 30 deg.C (without unit specified) STX 31H 33H 30H 30H 30H ETX 3FH 34H CR Total F4H eg.) Read Thermo-con internal sensor of unit No.2 SOH 32H 05H 32H 36H 39H CR Total 69H Note) Check sum is not ASCII code.
Set temperature to 30 deg.C (without unit specified) STX 31H 33H 30H 30H 30H ETX 3FH 34H CR Total F4H eg.) Read Thermo-con internal sensor of unit No.2 SOH 32H 05H 32H 36H 39H CR Total 69H Note) Check sum is not ASCII code.
Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.
Specification: 22 (Copper, Flourine and Silicon Free + Low Particle Generation, Vacuum Suction Type), Bore Size: Ø16, Stroke: 30mm, Adjuster: H (Without Adjuster), Magnet: W/Magnet and Rail, Auto Switch: M9NW (Solid State, 2-color Indication, 3 Wire NPN, Horizontal), Lead Wire: M (1m), Number: 4 pcs.
Specification: Copper, Flourine and Silicon Free + Low Particle Generation, Vacuum Suction Type, Bore Size: Ø16, Stroke: 30mm, Adjuster: Without Adjuster, Magnet: W/Magnet and Rail, Auto Switch: Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire: 1m, Number: 4 pcs.
30 L 10 B0.3 C A 3 6 0.3 -0.2 35 0 24 0 7 24 6 22 ()M4 35 11 .