Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to pitch moment load Displacement at "A" when load is applied at "F" Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

1

22 16.5 54 4H7 depth 5 +0.012 0 4H7 depth 5 +0.012 0 9 26 28 18 64 4H7 depth 5 +0.012 0 4H7 depth 5 +0.012 0 12 30 34 19 76 6H7 through +0.012 0 6H7 depth 8 +0.012 0 14 44 46 18.5 100 6H7 through +0.012 0 6H7 depth 8 +0.012 0 14 54 50 22 110 8H7 through +0.015 0 8H7 depth 11 +0.015 0 20 62 56 22 124 8H7 through +0.015 0 8H7 depth 11 +0.015 0 30 74 66 24 132 10H7 through +0.015 0 10H7 depth

CATALOG

Cylinder E EA EB EC EY F FB FC FH FW h S T TT W Shock Absorber a MYM-A20H MY1C20 20 10 32 7.7 50 5 14 3.5 46.7 7 5(MAX11) 58 RC1007 5 MYM-A25H MY1C25 24 12 38 9 57.5 6 52 17 16 66 4.5 67.3 12 5(MAX16.5) 70 RB1412 4.5 MYM-A32H MY1C32 29 14 50 11.5 73 8 67 22 22 82 5.5 73.2 15 8(MAX20) 88 RB2015 6 MYM-A40H MY1C40 35 17 57 12 87 8 78 22 22 95 5.5 73.2 15 9(MAX25) 104 RB2015 4 MYM-A50H MY1C50

A

Cylinder E EA EB EC EY F FB FC FH FW h S T TT W Shock Absorber a MYM-A20H MY1C20 20 10 32 7.7 50 5 14 3.5 46.7 7 5(MAX11) 58 RC1007 5 MYM-A25H MY1C25 24 12 38 9 57.5 6 52 17 16 66 4.5 67.3 12 5(MAX16.5) 70 RB1412 4.5 MYM-A32H MY1C32 29 14 50 11.5 73 8 67 22 22 82 5.5 73.2 15 8(MAX20) 88 RB2015 6 MYM-A40H MY1C40 35 17 57 12 87 8 78 22 22 95 5.5 73.2 15 9(MAX25) 104 RB2015 4 MYM-A50H MY1C50

smcmaintenancepartslist

32 1/4 Symbol C4 C6 N3 N7 Option Fitting assembly G The right reference Description None Oil-free Symbol Nil X17 ARM10 Straight type ARM10F Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y 236

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

SMC

2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With stroke adjuster at retraction end) I 5 11 10 9.5 8 8.5 5 4.75 8.5 5 18.5 NA-M4 x 0.7 thread depth 5 K KA 18.5 31.5 (With

The 11/22-MXPJ6 miniature high precision slide table provides travelling parallelism of 0.004 mm and non-rotating accuracy of +/-0.03° in a compact package, height: 17 mm and width: 20mm.

01-mxp-e

3 Gasket (for plug) PVC MXPJ6-PS MXPJ6-PS 6 O-ring NBR Piston seal Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 122 Air Slide Table Series MXP 8, 10, 12, 16 Replacement Procedure is P.326 Construction Actuators Modular F.R.L.

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore size: 6 mm ; Stroke lengths: 5 and 10 mm ; Non-rotating accuracy +/-0.03° ; Travelling parallelism 0.004 mm ; Rubber bumper ; RoHS compliant

Bore Size: Ø6, Stroke: 5mm

Bore Size: Ø6, Stroke: 5mm

The MXPJ6 is ideal for clean room applications and those that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees.

The MXPJ6 is ideal for clean room applications and those that require high precision movement in short travel situations. The precision slide table has a machined guide with very tight tolerances that operates in conjunction with highly accurate recirculating ball bearings. This slide is capable of achieving parallelism within 0.02mm and non-rotation accuracy as low as 0.03 degrees.

Specification: Clean Type, Vacuum Suction, Stroke: 5mm

Specification: 11 (Clean Type, Vacuum Suction), Stroke: 5mm