Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: CS (Metal Stopper, Extension End)

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Metal Stopper, Extension End, Functional Option: -, Auto Switch: -, Lead Wire: -, Number: -

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: CS (Metal Stopper, Extension End), Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: Z (5m)

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Metal Stopper, Extension End, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, 12MM MXQ DBL-ACT, ACTUATOR, MXQ GUIDED CYLINDER, F6, 12MM MXQ DBL-ACT, 1.98416 lb

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

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(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

Air Slide Table

MXQ 12-2 With end lock (12) Dimensions [mm] Model J MXQ12-10Z2 68 MXQ12-20Z2 70 MXQ12-30Z2 80 MXQ12-40Z2 98 MXQ12-50Z2 108 MXQ12-75Z2 152 MXQ12-100Z2 177 Pilot port 2 x M5 x 0.8 30 11.4 5 J 12 8.5 0.5 3 11 6 36.2 18.7 MXQ12-10Z2 Symmetric type * Dimensions other than those listed above are the same as those for the standard type.

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ1210 13-/22-MXQ1220 13-/22-MXQ1230 13-/22-MXQ1240 13-/22-MXQ1250 13-/22-MXQ1275 13-/22-MXQ12-100 Note) Note) 1322Note) Refer to the bottom

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

smcmaintenancepartslist

CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.

MX-OMP0051

M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(

2

M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

Rotary Actuator

Corresponding parts 50 P694020-22 Di, !0, !1, !4, @2 are included as a set. 63 P694030-22 80 P694040-22 100 P694050-22 Note) When ordering replacement parts, write 1 for one set of the parts per actuator. A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

35 40 70 29 16 34 13 20 3 22 50 19 5 1/4 CDRA1BSU80 M12 x 1.75 depth 14 0 0.036 8 112 172 28 25 12.5 16 73.5 M24 x 1.5 85 33 12 22 40 45 85 39 16 34 13 25 4 22 60 19 5 3/8 CDRA1BSU100 Foot style: CDRA1LSU Single shaft flange style: CDRA1FSU Foot bracket Auto switch D-A53 Mounting holes A port B port The dimensions above show pressurization to B port