Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ12L75 13-/22-MXQ12L-100 Note) Note) Note) Refer to the bottom view of MXQ12L-40. 1322811 MXQ 1322Air Slide Table Dimensions: MXQ12L / Symmetric Type 1322Axial piping (12): MXQ12L-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

1

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

ISO Cylinder

105 16 16 M16 x 1.5 6 M5 x 0.8 17 8 6 38 14.2 5 M6 x 1 24 8 18.3 16 56 10 22 111 20 20 M22 x 1.5 8 G1/8 20 8 8 44 17 6 M8 x 1.25 32 11 24 22 62 13 24 126 25 22 M22 x 1.5 10 G1/8 22 8 8 50 20 8 M10 x 1.25 32 11 30 22 65 17 28 137 With Rod Boot [mm] Item AM C e f K KK h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159

Electric Actuator/Slider Type

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the Z-phase rst detecting position.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

Stroke Reading Cylinder and Counter

18 36 10 64.5 195.2 59 71.5 65.5 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 193 202 235 14 221 20 28 22 44 14 76.5 215.7 71 83.5 M8 x 1.25 94 91 78 9 16.2 11 46 177.4 95 9 9 80 92 60 194 203 238 14 224 20 30 22 44 14 89.5 219.2 M10 x 1.5 91 84.5 97 109.5 113 107 108 DDimensions for auto switch model D-F79W.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 (mm) Dimensions D-M9W D-M9WV Indicator light M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw 2 8 3.2 4.6 Indicator light 4 2.6 2.8 2.7 20 2.7 2.8 4 22 3.2 2.6 9.5 6 Most sensitive position 4 6 Most sensitive position 144 LEJ Series Electric Actuator

2

M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70

Table of Contents

18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection thread 1 4 3 8 KAH12-U02 KAH12-U03 24.5 19.5 30.5 25.5 19 VMG 19 12 46.1 46.1 22 1 2 KAH12-U04 24.5 16.5 22 28 Reference dimensions after Uni thread installation.

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Table of Contents

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

Air Fittings & Tubing

Kl 9.8 19.5 20 16.5 21 11 KQ2ZF04-M5 8 21 24 47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

CATALOG

21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3/8 KQH11-U03 17.46 28 22 21 7 12 12 KQH12-U04 22 24.5 16.5 22 58.3 3/8 1/2 KQH11

Table of Contents

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.

V100

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow