Air Slide Table -50Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ16-10Z 38 16 16 8 39 39 58 22 28 98.5 4 2 72.5 87 MXQ16-20Z 38 20 20 12 39 39 58 15 39 108.5 4 2 76.5 91 MXQ16-30Z 48 21 21 30 48 48 50 16 48 118.5 4 2 86.5 101 MXQ16-40Z 58 28 28 17 58 58 80 23 58 135.5 4 2 103.5 118 MXQ16-50Z 40 51 27 45 80 28 63 145.5 6 3 113.5 128 MXQ16-75Z 46 23 75 58 52 52 80 34 88 176.5 6 3 144.5 159
-10 MXQ16-20 MXQ16-30 MXQ16-40 MXQ16-50 MXQ16-75 MXQ16-100 MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 8-5-28 29 Air Slide Table Series MXQ With shock absorber (16): MXQ16-BS/BT/B Shock absorber at retraction end Shock absorber at extension end 36.5 Maximum 20 36.5 Maximum 34 12 12.5 Stroke Adjustable Range (mm) MX Extension end 22 Retraction end 22 MTS MY Other dimensions
-MXQ1610 13-/22-MXQ1620 13-/22-MXQ1630 13-/22-MXQ1640 13-/22-MXQ1650 13-/22-MXQ1675 13-/22-MXQ16-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Axial piping (16): MXQ16-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control
(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7
CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.
M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(
F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400
MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.
MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.
Inlet air temperature 5 to 50C IDF (For IDF100F to 150F, up to 60C is allowed.)
0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.
(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..
Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30
24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 41.8 35.5 22 24 78 ASV510F-04-10S 10 R(PT)1/2 22 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 45.8 37.6 21 23 95 ASV510F-04-12S 12 R(PT)1/2 22 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 45.8 37.6 22 24 100
L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.
Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. JIS Symbol 14-15-5 2 Series HAW How to Order Precautions HAW 22 14 D Be sure to read before handling.
(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM
22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.
Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.
Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.