The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

smcmaintenancepartslist

CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.

1

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

MXQ

MXQ25-100 MXQ25-100 MXQ25-75 MXQ25-75 MXQ25-30 MXQ25-30 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-125 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-150 MXQ25-100 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-125 MXQ25-125 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20

Air Slide Table

-75Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ25-10Z 55 18 18 7 55 55 80 30 36 131.5 4 2 95 118 MXQ25-20Z 46 18 18 7 55 55 80 30 36 141.5 4 2 95 118 MXQ25-30Z 55 28 28 17 55 55 80 22 54 151.5 4 2 105 128 MXQ25-40Z 65 28 28 17 65 65 90 22 64 161.5 4 2 115 138 MXQ25-50Z 75 36 36 20 80 80 110 43 66 184.5 4 2 138 161 MXQ25-75Z 60 76 45 65 110 42 92 209.5 6 3 163 186 MXQ25-

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13-/22-MXQ2550 13-/22-MXQ2575 13-/22-MXQ25-100 13-/22-MXQ25-125 13-/22-MXQ25-150 Note) Note) 1322Note) Refer to the bottom view of MXQ25-75. 821 MXQ 1322Air Slide Table Dimensions: MXQ25 1322Axial piping (25): MXQ25-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

MX-OMP0051

M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(

CATALOG

21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3/8 KQH11-U03 17.46 28 22 21 7 12 12 KQH12-U04 22 24.5 16.5 22 58.3 3/8 1/2 KQH11

A

7 18 M18x1.5 69 14 90 18 +0.070 0 74 30 22 38 80 ~300 37 40 99.5 25 40 3 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 18 +0.070 0 28 56 35 18 50 100 ~300 37 40 120 30 50 3 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 22 +0.084 0 32 64 43 22 60 Courtesy of Steven Engineering, Inc. !

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Table of Contents

82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

VFS4000-OMY0001

-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D6 L18 L19 L20 L21 L22 L23 L24 L25 t2 AS-10D AS1002FS3.4 3.5 18.2 23.2 11 3.5 18 AS-20D AS2002FS 18.6 23.6 12.6 19.6 AS-25D AS2052FS 45 22 27 17 25.8 11.3 1.6 AS-30D AS3002FS4.5 4.4 27.2 32.2 22 4.4 30.8 AS-40D AS4002FS 28.1 33.1 28 36.8 Adapter for Direct Mounting Adapter for Manifold Mounting Part no.: AS-A Part no.: AS-A1 Part no.

IIIIIII

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Mechanical Valves Series NVM, NVFM, NVZNI

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Air Slide Table Series MXQ

-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm 0.06 0.08 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 800 200 400 600 0 100