Air Slide Table

-75Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ25-10Z 55 18 18 7 55 55 80 30 36 131.5 4 2 95 118 MXQ25-20Z 46 18 18 7 55 55 80 30 36 141.5 4 2 95 118 MXQ25-30Z 55 28 28 17 55 55 80 22 54 151.5 4 2 105 128 MXQ25-40Z 65 28 28 17 65 65 90 22 64 161.5 4 2 115 138 MXQ25-50Z 75 36 36 20 80 80 110 43 66 184.5 4 2 138 161 MXQ25-75Z 60 76 45 65 110 42 92 209.5 6 3 163 186 MXQ25-

Table of Contents

MGPL25-75A is selected.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13-/22-MXQ2550 13-/22-MXQ2575 13-/22-MXQ25-100 13-/22-MXQ25-125 13-/22-MXQ25-150 Note) Note) 1322Note) Refer to the bottom view of MXQ25-75. 821 MXQ 1322Air Slide Table Dimensions: MXQ25 1322Axial piping (25): MXQ25-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

smcmaintenancepartslist

CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.

MX-OMP0051

M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(

2

M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5 45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70

Table of Contents

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage

MGP

MGPL25-75A is selected.

MG

MGPL25-75A is selected.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Thermo-chiller

Handle: HRR-S0079 22 A HRLE Series tFilter for Circulating Fluid Fill Port Prevents foreign matter from entering the tank when supplying the circulating fluid. Can be used just by fitting into the circulating fluid fill port.

CATALOG

21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3/8 KQH11-U03 17.46 28 22 21 7 12 12 KQH12-U04 22 24.5 16.5 22 58.3 3/8 1/2 KQH11

A

7 18 M18x1.5 69 14 90 18 +0.070 0 74 30 22 38 80 ~300 37 40 99.5 25 40 3 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 18 +0.070 0 28 56 35 18 50 100 ~300 37 40 120 30 50 3 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 22 +0.084 0 32 64 43 22 60 Courtesy of Steven Engineering, Inc. !

Air Slide Table Series MXQ

-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm 0.06 0.08 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 800 200 400 600 0 100

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.