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SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Air Slide Table

ZZ MXQ 16-2 With end lock (16) Dimensions [mm] Pilot port 2 x M5 x 0.8 33 Model J MXQ16-10Z2 78 MXQ16-20Z2 82 MXQ16-30Z2 92 MXQ16-40Z2 109 MXQ16-50Z2 119 MXQ16-75Z2 150 MXQ16-100Z2 194 MXQ16-125Z2 219 5 J 7.5 3 7.5 4.5 0.5 3 62 43 3 13.8 7.5 MXQ16-10Z2 5 J * Dimensions other than those listed above are the same as those for the standard type.

smcmaintenancepartslist

Content and quantity Clamp arm Cotter pin Applicable hole diameter For 13 hole For 15 hole For 16 hole For 18 hole For 20 hole For 25 hole For 30 hole CKQG-13A CKQG-15A CKQG-16A CKQG-18A CKQG-20A CKQG-25A CKQG-30A 1 1 1 1 1 1 1 1 1 1 1 1 1 1 For 20 hole (Round/With Shim) 183 Pin Clamp Cylinder/Compact Cylinder Type Series CKQG32 Construction CKQG32-100RH-X2082 e Tube gasket w Rod seal q Piston

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 92 116 20 30 97 121 25 102 126 30 107 131 35 112 136 40 40 117 141 45 122 146 50 132 156 60 142 166 70 147 171 75 60 152 176 80 162 186 90 172 196 100 8-29-14 15 Dual Rod Cylinder: With Air Cushion Series CXS Dimensions: 25 57.5 22 45.5 10 2-cushion needle MX

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Axial piping (16): MXQ16-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

CATALOG

Piece n n Pieces * Not Available with MXQ6 F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

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F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

Pulse Valve

), 1 (25A), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

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Silencer box assembly: VVQ4000-33A (With gasket, screw) Type SU Double check spacer with residual pressure exhaust VVQ4000-25A-1 (Plug-in type) VVQ4000-25A-5 (Plug lead type) Caution Specifications Double check spacer part no.

Coolant Valve

Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid

VNH

A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid pressure Fluid Operation Operating fluid temperature 0 to 3.5 MPa Coolant External pilot solenoid/Air operated 5 to 60C /5 to 60C (NBR seal) 5 to 60C /5 to 99C (FKM seal) 0 to 7.0 MPa VNH A 1 3 1 3 VNH B Pressure Temperature

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.