1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

Air Slide Table

ZZ MXQ 16-2 With end lock (16) Dimensions [mm] Pilot port 2 x M5 x 0.8 33 Model J MXQ16-10Z2 78 MXQ16-20Z2 82 MXQ16-30Z2 92 MXQ16-40Z2 109 MXQ16-50Z2 119 MXQ16-75Z2 150 MXQ16-100Z2 194 MXQ16-125Z2 219 5 J 7.5 3 7.5 4.5 0.5 3 62 43 3 13.8 7.5 MXQ16-10Z2 5 J * Dimensions other than those listed above are the same as those for the standard type.

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813 MXQ 1322Air Slide Table Dimensions: MXQ16 1322Axial piping (16): MXQ16-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Table of Contents

How to Order MHZ Bore size MHF MHS 3 D 20 16 to 25 M9N MHL Number of auto switches MHR Nil S 2 pcs. 1 pc.

MHF2

DHigh degree of mounting flexibility Strong gripping force 20As no brackets are required, mounting height can be minimized.

MHF2

DHigh degree of mounting flexibility Strong gripping force 20As no brackets are required, mounting height can be minimized.

MXS

) 12 32 18 24 9.5 F 3H9 2.5 deep +0.025 0 10 N -1 X F 2-M3 X 0.5 thread 5 deep 2 11 3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) X H G H 11 5.5 5.5 11 A B 6.5 3.2 7 7 12 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Cross section BB Cross section AA With auto switch Basic style MXS6-10 MXS6-20 MXS6-30 MXS6-50 VWith stroke adjuster MXS6-10AS MXS6-20AS

Air Slide Table Series MXQ

F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !