Air Slide Table

ZZ MXQ 25-mm2 With end lock (25) Pilot port 2 x M5 x 0.8 Q 5 J 13 13 0.5 12.5 3 19 Dimensions [mm] 66 88 Model J Q MXQ25-10Zm2 109 48 MXQ25-20Zm2 104 11 43 MXQ25-30Zm2 114 MXQ25-40Zm2 124 MXQ25-50Zm2 147 MXQ25-75Zm2 172 MXQ25-100Zm2 213 3 MXQ25-10Z2 3 5 J 73 MXQ25-125Zm2 277 MXQ25-150Zm2 302 * Dimensions other than those listed above are the same as those for the standard type.

smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

Air Slide Table Series MXQ

-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm 0.06 0.08 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 800 200 400 600 0 100

Electric Actuators

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

Table of Contents

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Example: LEFS16B-100B-S1) * For the SpeedWork Load graph of the actuator, refer to the LECPA section on the model selection page of the electric actuators Web Catalog. Specifications For the setting of functions and operation methods, refer to the operation manual on the SMC website.

2 Phase Stepper Motor/Without Motor Brake Series LXP

micro sensor wire (300mm) Brake wire (300mm) 4.5 4H9 +0.030 0 Brake electrical circuit +24V Brown [Yellow] 4H9 +0.030 0 3 6 0V 49 38 White [Yellow] Section C detail (Scale: 2/1) Stroke + 104 (Stroke: 50 to 100mm) Stroke + 121 (Stroke: 125 to 200mm) 4H9 +0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 D E Model LXPB5BC-50B LXPB5BC-75B LXPB5BC-100B

Bore Size: 25mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 100mm, Adjuster: Both Sides Adjusters/Shock Absorbers, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 25mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 100mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers)

Bore Size: 25mm, Symmetric Type: Standard, Stroke: 100mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 25mm, Symmetric Type: Standard, Stroke: 100mm, Adjuster: Both Sides Adjusters/Shock Absorbers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

Multi-Axis Step Motor Controller

(Example: LEFS16B-100B-S1) * For the SpeedWork Load graph of the actuator, refer to the LECPA section on the model selection page of the electric actuators Web Catalog. Specifications For the setting of functions and operation methods, refer to the operation manual on the SMC website.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

High Vacuum Angle Valve

Example) -M9NL !