VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

Table of Contents

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

0.4

The X and PE port size of External pilot type (R, RS) are 4 (mm) or 5/32" (inch) for the SV1000/2000 series, and 6 (mm) or 1/4" (inch) for the SV3000 series. 24 Series SV How to Order Manifold Assembly Example (SV1000) Double solenoid SV1200-5FU (2 sets) Single solenoid SV1100-5FU (2 sets) Manifold SS5V1-W10S1NAND-04B-C6 (1 set) U side D side SS5V1-W10S1NAND-04B-C61 set (Manifold part no.

VQ7-6/7-8

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 33 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC

VQ7-6/7-8

P reduced pressure ARB350-00-P A B A B A reduced pressure ARB350-00-A B reduced pressure ARB350-00-B 3-10-32 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts Main EXH back pressure check plate AXT512-25A Interface regulator ARB350-00P A B Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 VK VZ SMC SMC 238.5

Pressure Relief 3 Port Valve With Locking Holes

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

60

Applicable air preparation equipment VHS2510 VHS3510 VHS4510 VHS4510-06 VHS5510 Y200-A Y300-A Y400-A Y500-A Y600-A AC20-A AC25-A, AC30-A AC40-A AC40-06-A AC50, AC55 Note), AC60 Note) Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Note) VHS5510 can be connected to AC55 and AC60.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Applicable FRL Spacer with bracket Y400 VHS4510 AC40 Y500 VHS4510-06 AC40-06 Y600 VHS5510 AC50/55/60 1940 Pressure Relief 3 Port Valve with Locking Hole Series VHS4510/5510 Construction Precautions VHS45105510 r e u Be sure to read before handling.

VS7-6

18A for air release valve adaptor plate Blank plate AXT512-17A Air release valve adaptor plate Interface regulator Relief style ARB350-00P (P port reguralation) A (A port reguralation) B (B port reguralation) 3 8 1 2 AXT512-19A-1 AXT512-19A-2 Interface for reverse pressure R1, R2 Individual EXH spacer Interface speed control VV72-R2-04 AXT510-32A Main EXH back pressure block plate AXT512-25A

Modular F.R.L. Unit

E EXH D JIS symbol Specifications A Model Port size Effective area (mm) IN to OUT OUT to EXH 10 14 16 31 22 38 57 Port size IN/OUT port size EXH port size 1/8 1/4 1/4 3/8 1/4 3/8 1/2 11 16 14 29 15 29 51 Model A B C D E F VHS2000 1/8, 1/4 1/8 40 53 70 56 74 80 36 45 48 28 48 54 22 28 36 25 30 30 VHS2000 VHS3000 VHS4000 VHS3000 1/4, 3/8 1/4 Note) 1/4, 3/8, 1/2 3/8 VHS4000 Note) Series VHS4510

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Body Size: 4, Thread: Rc, Port Size: 04 (1/2), Handle/Bonnet Material: B (Aluminum)

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/2, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Hydraulic

shaft 3 x 18l 3 x 18l Size Tolerance AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 3.2 x 16l 14 5 20 18 M8 x 1.25 36 16 9 20 CDP-1 9 +0.058 0 Y-03 +0.2 +0.1 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l +0.3 +0.1 +0.3 +0.1 +0.070 0 +0.070 0 Y-04A Y-04B

Series VS

SMC Conduit Port Thread (for terminal box only) Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side 1/2 Size 1, 2, 3 06 Side 3/4 Size 2, 3 10 Side 1 Size 3 02B Bottom and side 1/4 with plug on side Size 1 03B Bottom and side 3/8 with plug on side Size 1, 2 04B