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Compressed air inlet Compressed air outlet Valve closed Valve open 51 Series IDF/IDU Specific Product Precautions 3 Air Preparation Equipment Be sure to read this before handling. Refer to page 1154 for Safety Instructions.

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Manifold Metal Base Plug-in Page 40 Type 50/ Side ported Type 51/ Bottom ported Type 52/ Top ported Type 50/Side Ported, Type 51/Bottom Ported, Type 52/Top Ported Page 41 Metal Base Plug-in D-sub connector D-sub Connector, Flat Ribbon Cable, PC Wiring System [IP40] Flat ribbon cable Page 43 Type 50/Side Ported Page 43 Type 51/Bottom Ported PC wiring Page 63 Type 52/Top Ported Page 68 Wiring

Table of Contents

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster 51 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 25A [Functional Option] MXQ 25A-mm8 Buffer, Centralized adjuster (25) Double-ported type MXQA *1 The extension stroke end adjuster (shock absorber) uses long adjustment nut and bolt specifications (-X28). (A standard adjuster cannot be mounted on the product.)

Battery-less

3 2 1 3000 51 3 EMG 6 LK RLS It can be connected to the controller directly.

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*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

2/3 Port Valve

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A

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Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note 1) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 60 Note) 20 to 60 NBR (FKM) Note 2) 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note 1) VXD23 to 26 (8A to 25A) VXD27

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

VQ5000

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

Table of Contents

Pitch P = 51 Pitch P = 51 2n-Rc , 1 2 3 4 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2n-Rc 1 2 D side Plug assembly VVFS2000-30A(Option: Refer to page 3-8-8.)

Proposals for Energy Saving

Electrical option Nil None S With surge voltage suppressor L With indicator light Z With surge voltage suppressor/indicator light Body size 4 15A 5 20A 6 25A 7 32A 8 40A 9 50A Refer to Table 2 below for applicability.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

Table of Contents

100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

HRX-OM-Q026

(English 1, Japanese 1), Operation Manual 2 copies (English 1, Japanese 1), Accessories Y strainer (40 mesh) 25A, Barrel nipple 25A, Anchor bracket 2 pcs.