XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

ISO Cylinder

3 3 3 3 D-A9l*1 D-A9lV 7 6 6 6 6 Band mounting D-H7l D-H7lW D-H7BA D-H7NF 3 3 3 4 4 4 4.5 5 D-H7C 8 8 8 9 7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6 5 5 6 4.5 4.5 D-A7l/A80 D-A7lH/A80H D-A73C/A80C 8 8 9 9 7 7 7.5 7.5 D-A79W*2

Made to Order

) Cushion valve Top width across flats 3 (Tube cover side only) 3 x 1/4 (Rc, NPT, G) Piping port 3 x 1/4 (Rc, NPT, G) Piping port S + Stroke N 52 30 3 20 14 2 x Speed controller valve Top width across flats 3 45 W 10 45 17 M16 x 1.5 11.5 45 Hs 30 IA IB 40 35 20 Width across flats 17 Shaft: 12d9 0.050 0.093 38 4 x M6 x 12 F R15 Hole: 12H8 +0.027 0 97 78 + Stroke 190 + Stroke (mm) Clevis width

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

C85

3 !4 !5 !6 !

Cylinder with Lock

3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

C95

3 to !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Load voltage Auto switch model Lead wire length (m) Indicator light Electrical entry Wiring (Output) Pre-wired connector Applicable load DC Type Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed auto switch Solid state auto switch IC 5 V, 12 V

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

CATALOG

8 5/8 3/8 1/8 3/8 7/16 1.1 2 3/16 1 1/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 2 1/2 1.71 3 5/8 2.6 0.3 1 1/8 6 3/16 1.26 1 2.4 6 200 (2) 1 1 7/16 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 2 11/16 1 3/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 3 1.75 3 3/4 3.1 0 1 1/8 6 5/16 1.3 1 2.48 6 1/8 250 (2.5) 1 1 5/8 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 3 1/8 2 1/4 3/8 9/16 3/8 5 3/4 3/8-24 3 3/4 2.34 4 1/4 3.9 0

Table of Contents

0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

MGP

MB MC (Width across flats) MGPM, MGPL Common Dimensions (mm) MD Bore size (mm) MA MB MC MH ML MD MP MT 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9 9 12.5 12.5 16 16 20 20 28 28 M5 x 0.8 M5 x 0.8 M8 x 1.25 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 3 3 3

C95

3 !4 !5 !6 !7 !8 !

MY1

Note 3) The applicability of order made options differs depending on size and model. Refer to the order made section on page 105 for details. New New ew ew Uses two linear guides.

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

A

1/2 5/8 3/8 3/4 3/4 1/2 6 1/4 250 (2.5) 1 1/8 3.1 1.5 1/2 5/16-24 3 0 1.3 1.06 1 1 3/8 2.48 6 3/4 3 3/4 2.13 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1/2 7 3/4 325 (3.25) 1 5/8 3.9 2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 1 3/8 1 5/8 2.72 8 1/2 1 1 1/4 4 1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 7 3/4 400 (4) 1 3/8 1 5/8 4.7 2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 1 5/8 2.72 8 1/2 1 1 1/4 4

Electric Actuator/Slider Type

3 !

CY1F

Refer to page 30 and 31 for detailed selection procedures. 3 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 2 CY1F/M2 1 CY1F/M1 3 CY1F/M3 30 30 30 CY1F25 20 20 20 CY1F25 CY1F25 10 10 10 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CY1F15 3 3 3 CY1F10 2 2 2 CY1F15 CY1F15 CY1F10 CY1F10 1 1 1 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston