SY

SS5Y31, #3 + #15 8 Body Ported Type Note) [ ]: Values for AC < >: Values with surge voltage suppressor Series SY5000 Dimensions With foot bracket SY5120-F1 2 position single Grommet (G), (H): SY5120(-F2) Scale: 40% G H C4 C6 C8 G H C4 C6 C8 G H SY5120-01 L type plug connector (L): SY5120-LDIN terminal (D): SY5120-DC4 C6 C8 M type plug connector (M): SY5120-MC4 C6 C8 C4 C6 C8 Applicable cable

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY5000 Dimensions Note)< >: Values with surge voltage suppressor With foot bracket SY5120-F1-Q 2 position single Grommet (G), (H): SY5120(-F2)-Q Scale: 40% G H C4 C6 C8 G H C4 C6 C8 G H SY5120-01-Q L type plug connector (L): SY5120-L-Q DIN terminal (D): SY5120-D-Q C4 C6 C8 M type plug connector (M): SY5120-M-Q C4 C6 C8 C4 C6 C8 Applicable cable O.D. 3.5 to 7 59.2 51.7 Max.10 104.9 40.4 Pg

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[35.1] (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 23 32.5 20.5 M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): D Y 10-SY5120(-F2) C4, N3 C6, N7 C8, N9 10-SY5120-WO(-F2) C4, N3 C6, N7 C8, N9 10-SY5120-M(-F2) C4, N3 C6, N7 C8, N9 10-SY5120-L(-F2) C4, N3 C6, N7 C8, N9 60.9 53.4 42.1 27 Applicable cable O.D. 3.5 to 7 (

5 Port Solenoid Valve SY Series

hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10

Fluoropolymer Piping Equipment

B D E F G H L1 L2 L3 M Min. port size LQ1T2A-TT1 L2 L2 H 2 x B 1/4" 4 1/4" x 5/32" 15 6 12 14 28 28.5 18 16.5 3.6 LQ1T2A-TT2 LQ1T2A-TT3 LQ1T2A-TT4 LQ1T3A-TT1 M (E) L1 F 3/8" 5 3/8" x 1/4" 20 9 18 17 36.5 37.6 24 23 5.8 LQ1T3A-TT2 LQ1T3A-TT3 LQ1T3A-TT4 LQ1T4A-TT1 D L3 L3 G Class 2 to 5 Type T3 D 1/2" 6 1/2" x 3/8" 24 9 18 21 43 43 28 28 9 LQ1T4A-TT2 LQ1T4A-TT3 LQ1T4A-TT4 LQ1T5A-TT1 L2 L1 2

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

M-E05-1-LQ1

19 x 16 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT3 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 19 x 16 LQ1T51-TT4 5 Tubing extensions 19 x 16 5-19 LQ1-5N19 LQ1-5B19 LQ1T61-TT1 6 6-25 LQ1-6N25 LQ1-6B25 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT2 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT3 6 6-25 LQ1-6N25 LQ1-6B25 Tubing

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

1

C4, C6 : 14.8 C8 : 17.2 1/4 [1(P), 5(EA), 3(EB) port] L3 Note) These figures show the SS5Y5-51S5-05D-C8.

4/5 Port Solenoid Valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

CATALOG

NAR3001 1/4 3/8 53 127.5 35 53 29.5 41 40 46 6.5 8 53 2.3 42.5 NAR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 52.5 Courtesy of Steven Engineering, Inc. !

V100

PVT317-53-1A 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

10-SS5YJ3-32-C4 10-SYJ333 1/8 Type 10-SS5YJ3-S32-M5 Type 10-SS5YJ3-S32-C4 Type 10-SS5YJ3-41-M5 Base mounted for internal pilot Type 10-SS5YJ3-41-C4 10-SYJ343 1/8 Type 10-SS5YJ3-S41-M5 Type 10-SS5YJ3-S41-C4 Type 10-SS5YJ3-46-M5 Type 10-SS5YJ3-46-C4 1/8 M5 x 0.8 10-SYJ343 Type 10-SS5YJ3-S46-M5 Type 10-SS5YJ3-S46-C4 Note) The values are for individually operated 2 position type manifold bases

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

SYJ3000/5000/7000

-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

V

Normally Closed 14 or less 18 or less Maximum 12.6 (0.7) Rubber VQZ235 53 Normally Closed 15 or less 20 or less Diameter 10 (0.55) Metal VQZ225 53 Normally Open 14 or less 18 or less 12.6 (0.7) Rubber VQZ245 53 Normally Open 15 or less 20 or less Note 2) 16.2 (0.9 VQZ300 Metal VQZ315 77 Normally Closed 17 or less 22 or less Weight 21.6 (1.2) Rubber VQZ235 77 Normally Closed 25 or less 33

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)