Fluoropolymer Piping Equipment

B D E F G H L1 L2 L3 M Min. port size LQ1T2A-TT1 L2 L2 H 2 x B 1/4" 4 1/4" x 5/32" 15 6 12 14 28 28.5 18 16.5 3.6 LQ1T2A-TT2 LQ1T2A-TT3 LQ1T2A-TT4 LQ1T3A-TT1 M (E) L1 F 3/8" 5 3/8" x 1/4" 20 9 18 17 36.5 37.6 24 23 5.8 LQ1T3A-TT2 LQ1T3A-TT3 LQ1T3A-TT4 LQ1T4A-TT1 D L3 L3 G Class 2 to 5 Type T3 D 1/2" 6 1/2" x 3/8" 24 9 18 21 43 43 28 28 9 LQ1T4A-TT2 LQ1T4A-TT3 LQ1T4A-TT4 LQ1T5A-TT1 L2 L1 2

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

M-E05-1-LQ1

19 x 16 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT3 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 19 x 16 LQ1T51-TT4 5 Tubing extensions 19 x 16 5-19 LQ1-5N19 LQ1-5B19 LQ1T61-TT1 6 6-25 LQ1-6N25 LQ1-6B25 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT2 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT3 6 6-25 LQ1-6N25 LQ1-6B25 Tubing

2

EXH Specifications Model Port size Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH IN OUT OUT EXH

One-touch Fittings

P.53 KQ2W P.54 KQ2E Use to connect tubing through a panel, etc. Bulkhead connector P.54 KQ2E Use to connect a male thread and tubing through a panel, etc. P.53 KQ2T Male branch tee Male connector P.52 KQ2H Use to pipe a female thread in the same direction. Most general model. Use to branch a female thread at both 90 angles.

V100

PVT317-53-1A 1 pc.

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 4 (3-Position Exhaust Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: N9 (ø5/16" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 3-Position Exhaust Center, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: w/Side Bracket

Actuation: 3-Position Exhaust Center, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø5/16" One-touch Fitting, Inch, Thread Type: Rc, Bracket: w/Side Bracket

Actuation: 3 (3-Position Closed Center), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)

Actuation: 3-Position Closed Center, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Side Bracket

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Side Bracket

Compact Vacuum Unit Ejector/ Vacuum Pump System

Pressure Sensor Assembly 53 Vacuum Pressure Switch Assembly 54 Troubleshooting 55 1 - Doc. no.

Table of Contents

Load (kg) m1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m4 m2 m3 Moment (Nm) F3 M3=F3 x L3 L3 F1 M1=F1 x L1 F2 M2=F2 x L2 L1 L2 1.

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.