M-E05-1-LQ1

19 x 16 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-TT3 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 19 x 16 LQ1T51-TT4 5 Tubing extensions 19 x 16 5-19 LQ1-5N19 LQ1-5B19 LQ1T61-TT1 6 6-25 LQ1-6N25 LQ1-6B25 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT2 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT3 6 6-25 LQ1-6N25 LQ1-6B25 Tubing

Intrinsically Safe Valve

Intrinsically Safe Valve 5 Port Solenoid Valve (Body Ported) (Base Mounted) UL Certified Intrinsically Safe Valve Designed for Use in Intrinsically Safe Environment UL913 & CSA157 Compliant Series 53-SY5000/7000/9000 NC300-C Dimensions Compact, High Flow Compact, High Flow B A L3 Model Dimension L1 L2 L3 53-SY5120-L 53-SY5120-LL 53-SY5120-TT 53-SY7120-L 53-SY7120-LL 53-SY7120-TT 53-SY9120

2

EXH Specifications Model Port size Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH IN OUT OUT EXH

One-touch Fittings

P.53 KQ2W P.54 KQ2E Use to connect tubing through a panel, etc. Bulkhead connector P.54 KQ2E Use to connect a male thread and tubing through a panel, etc. P.53 KQ2T Male branch tee Male connector P.52 KQ2H Use to pipe a female thread in the same direction. Most general model. Use to branch a female thread at both 90 angles.

V100

PVT317-53-1A 1 pc.

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric)

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: -, Bracket: -

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: -, Bracket: -

Compact Vacuum Unit Ejector/ Vacuum Pump System

Pressure Sensor Assembly 53 Vacuum Pressure Switch Assembly 54 Troubleshooting 55 1 - Doc. no.

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

ZB-OM00301

15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 20 (2000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)