Compact Vacuum Unit Ejector/ Vacuum Pump System

Pressure Sensor Assembly 53 Vacuum Pressure Switch Assembly 54 Troubleshooting 55 1 - Doc. no.

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Push-turn Locking Slotted Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

ZB-OM00301

15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)

Actuation: C (4-Position Dual 3 Port Valves, N.C./N.O.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: E (Push-turn Locking Lever Type), A,B Port: 01 (1/8)

Actuation: 4-Position Dual 3 Port Valves, N.C./N.O., Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Push-turn Locking Lever Type, A,B Port: 1/8, Thread Type: -, Bracket: -

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: N7 (ø1/4" One-touch Fitting, Inch)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port Size: 02 (1/4), Thread Type: N (NPT)

Actuation: 2 (2-Position Double), Pilot Type: Internal Pilot, Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), Port Size: 03 (3/8 w/Sub-plate), Thread Type: N (NPT)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Push-turn Locking Slotted Type, A,B Port: ø1/4" One-touch Fitting, Inch, Thread Type: -, Bracket: -

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Push-turn Locking Slotted Type, A,B Port Size: 1/4, Thread Type: NPT, Bracket: -

Actuation: 2-Position Double, Pilot Type: Internal Pilot, Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Push-turn Locking Slotted Type, Port Size: 3/8 w/Sub-plate, Thread Type: NPT

This is a legacy product, and replaced byLVA20-01N-A-V-Z, FLUOROPOLYMER, VALVE, VALVE, FLUOROPOLYMER VALVES and REG, 2I, FLUOROPOLYMER, 0.44273 lb

This is a legacy product, and replaced byVT307-5DO1-01N-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.34012 lb