Plug-in/Plug Lead: Single Unit 00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3
-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in
-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in
(ARBQ5000-00 A B C 1 5) q AXT632-25-6 (M4 x 114) 4 Valve + Interface regulator SQ w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate.
S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.
Model: ARBQ5000, Port: B (Regulating Port B)
Model: ARBQ5000, Port: P (Regulating Port P)
(inch) Model D1 L M Weight (g) Applicable tubing 5 32 KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 1 4 5 16 20.5 3 8 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Weight (g) Model Note) D L A KQ2P-01 KQP-01 KQ2P-03 KQP-03 KQ2P-05 KQP-05 KQ2P-07 KQP-07 KQ2P-09 KQP-09 KQ2P-11 KQP-11 KQ2P-13 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 5 6 6.8 8.5
(inch) Weight (g) (1) Part No. D L M KQ2H01-00 KQ2H03-00 KQ2H05-00 KQ2H07-00 KQ2H09-00 KQ2H11-00 KQ2H13-00 9.6 10.4 11.4 13.2 15.2 17.9 21.7 31.5 32.5 34 34.5 38.5 42.5 44.5 15.5 16 16.5 17 18.5 21 22 2.5 3 3.5 4.6 6 7 9.6 3 3 4 4 6 11 16 1 8 5 32 3 16 1 4 5 16 3 8 1 2 Note1) D: max. diameter Male elbow: KQ2L 01-32 KQ2L03-32 07-32 Tube O.D. (inch) L2 A M Thread UNF NPT Part No. H (Hex.)
LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.
(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5
(mm) 3.2 4 Effective area (mm2) Nylon Note) Mounting plate thickness 1 mm or less Mounting T (M) Weight (g) M L Model hole Urethane 2.9 4 2-applicable tubing KQ2E23-00 KQ2E04-00 26 26 M12 x 1 M12 x 1 13 13 3.4 5.6 15.5 16 6 8 10 12 16 14 14 17 31.5 32.5 KQ2E06-00 34.5 13.1 26.1 10.4 18.0 33 15 17 18.5 21 22 25 M14 x 1 M16 x 1 KQ2E08-00 19 38 52 17 KQ2E10-00 70 M20 x 1 21 41.5 58.3 113 29.5
Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.
(inch) 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" D Note 1) D M Weight (g) Q A L O N Model KQG2L01-00 KQG2L03-00 KQG2L07-00 KQG2L09-00 KQG2L11-00 KQG2L13-00 2.9 3.1 3.7 5 5.7 6.4 3 4.2 11.4 21.6 35.2 50.2 6.3 7.4 11.5 20.2 28.2 41.7 19.3 20.5 23.2 29.1 31.1 35.3 8.3 9.1 11.7 13.7 16 19.6 13.6 14.6 16.7 20.1 21.4 24.9 3.2 3.2 3.2 4.2 4.2 4.2 5.6 5.6 5.6 8 8 8 12 12.6 13.5 16.1 16.6 18.5 M L Q A D N M
1 1 1/4 115/16 5/8 3/4 9/16 3/8 11/32 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 2.76 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 1 1/2 2 7/16 7/8 1/2 27/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 3.32 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 2 1/16 2 7/16 7/8 1/2 27/64 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S D U A L O P E R A T
Model Weight (g) N L A Q M D (inch) KQGT03-00 KQGT07-00 KQGT09-00 KQGT11-00 KQGT13-00 10.6 20.6 28.7 4.1 18 28 6.4 5/32 3.2 13 22.4 31.4 4.9 18.8 42 10.6 1/4 M N D L A 15 25.5 36.3 6.1 20.9 57 25.6 5/16 D 18 28.6 40.6 7.1 23 4.2 95 40 Q 3/8 20.8 31.4 44.5 8.1 23.4 129 57.4 1/2 M M L L Note 1) D is maximum diameter.
(mm) Model Mounting hole Mounting plate thickness 11 mm or less M T (M) L 4 Nylon Urethane KGE06-00 KGE04-00 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 4 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 26.1 41.5 Applicable tubing 6 8 10 10.4 18.0 29.5 12 27 16 32 M28 x 1.5 51 25 113 (96) 115 KGE16-00 29 Note) Dimensions
fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.