Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

VQ5000

-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-00-A-1 A VQ50 (plug-in type) ARBQ5000-00-B-1 B ARBQ5000-00-P-1 P ARBQ5000-00-A-5 A VQ55 (plug lead type) ARBQ5000-00-B-5 B ARBQ5000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P 39 Series VQ5000 Base Mounted Type Specifications ARBQ5000 Interface regulator model Reduced pressure port P A B Plug-in Plug lead Plug-in Plug lead Plug-in

5 Port Solenoid Valve

(ARBQ5000-00 A B C 1 5) q AXT632-25-6 (M4 x 114) 4 Valve + Interface regulator SQ w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate.

VQ5000

S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.

Model: ARBQ5000, Port: A (Regulating Port A)

Model: ARBQ5000, Port: P (Regulating Port P)

Model: ARBQ5000, Port: Regulating Port A

Model: ARBQ5000, Port: Regulating Port P

Table of Contents

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

Table of Contents

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

Table of Contents

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

CATALOG

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

KJ

(mm) 4 T B E M Model hole Urethane 4.2 M12 x 1 18 16 6 8 10 12 14 17 14 17 18.5 31 10.4 13 KQ2LE06-00 12.8 11.4 21.6 9.0 14.9 25 15 17 18.5 21 22 M14 x 1 M16 x 1 20.5 23.5 34 38.5 KQ2LE08-00 17 19 15.2 33 17 KQ2LE10-00 M20 x 1 63 22 24 24 27 26.5 43.5 18.5 21 25.0 39.7 35.2 50.2 KQ2LE12-00 20.9 M22 x 1 28.5 77 23 45.5 Note) D: Max. diameter Mounting plate thickness 7 mm or less Bulkhead Connector

Air Fittings & Tubing

T B E M D M12 X 1 18 4 KQ2LE04-00 14 17 14 17 18.5 31 10.4 4.2 16 6 8 10 12 13 4.2 M14 X 1 M16 X 1 KQ2LE06-00 12.8 11.4 21.6 9.0 14.9 25 15 17 18.5 21 22 20.5 23.5 34 38.5 19 15.2 33 17 KQ2LE08-00 17 M20 X 1 63 KQ2LE10-00 26.5 43.5 18.5 21 35.2 50.2 22 24 24 27 25.0 39.7 M22 X 1 28.5 77 23 KQ2LE12-00 20.9 45.5 Note1) D: max. diameter SKQ20, #21 to #25 Bulkhead connector: KQ2E Tube O.D.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VVFS3000-R-03-1 VVFS3000-R-03-2 VP4 Body type Plug-in type Non plug-in type P port regulation A port regulation B port regulation ARBF3050-00-B-1 ARBF3050-00-B-2 ARBF3050-00-P-1 ARBF3050-00-P-2 S0700 ARBF3050-00-A-1 ARBF3050-00-A-2 VQ SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block disk in between stations subjected to different

VM

A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 9 Hand Valve Series VH Precautions Be sure to read before handling.

2/3 Port Valve

base V Common SUP Individual SUP (For vacuum) Class B Class H G C D, T G, C S(1) _ S L, Z _ S L, Z T Manifold base Mark Applicable valve VX21l1-00 VVX21 VVX22 VVX23 Port size VX22l1-00 VX23l1-00 1 2 Rc(PT) Rc(PT) 1 8 1 4 AC All common ports are 3/8.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW P SYJ 44 54.5 B B B B B SZ X SMC SMC SMC 27 VP4 46 (External pilot port) 2 x Rc 1/8 54 S0700 1(P), 5(R1), 3(R2) port 6 x Rc 1/2 VQ Pilot valve manual override D side U side VQ4 1 2 3 4 5 6 7 n Stations VQ5 VQC VQZ SMC SMC 139 123 SQ 104 B B B B B B B 79.5 14.5 63.5 49.5 VFS A A A A A A A VFR 19 33 54 2 VQ7 4(A), 2(B) port 2n x Rc 1/4, 3/8 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use