Table of Contents

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket part no. YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket part no. YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

VFS

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

2

)-A 03-A Y510-(02)-A 03-A Y610-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A

Smooth Cylinder/Low Speed Cylinder

Type A mounting bracket part no. YA-03 Joint YU-03 RS T2 V M W REA Joint REB Joint and Mounting Bracket (Type A, Type B) Part No. T1 Applicable mounting bracket Bore size (mm) E 2 x O counterbore 2 x D through REC Joint part no.

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Hydraulic

MA a A MA a Air release R (max.)

Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

A

E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth

CLQ

(Example) For bore size 40 Part number A type mounting bracket . YA-03 Joint . YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no.

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

Compact Cylinder with Lock Series CLQ

(Example) For bore size 40 Part number A type mounting bracket . YA-03 Joint . YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no.

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Soft Start-up Valve AV2000/3000/4000/5000

K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29

Soft Start-up Valve

Description Material AV2000-A AV3000-A AV4000-A AV5000-A 4 Pilot valve assembly*1 See below.

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.