PSxx-OMU0002CN

[F 6] 5R.D. <> [F 6] [F 6] -41No.PS-OMU0002CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 44 () () () 44 () [F10] -42No.PS-OMU0002CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -43No.PS-OMU0002CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -44No.PS-OMU0002CN-D

PSxx-OMU0005CN

[F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] () OUT2 n2H OUT1 OUT2 n2L OUT1 n1L OUT1 OUT2 n1H [F10 ] -44No.PS-OMU0005CN-C 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 ( ) OUT2 OUT2 ( ) OUT2 () ( ) OUT2

PSxx-OMU0008CN

MPa 10.0-105.0 kPa -115.0115.0 kPa -42No.PS-OMU0008CN-D [F 6] 5R.D. <> [F 6] [F 6] -43No.PS-OMU0008CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] () () [dUAL] 46 () () () 46 () [F10] -44No.PS-OMU0008CN-D <> () OUT1 OUT1 OUT2 OUT2 n_1 n_2 [F10 ] () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 n1L n1H n2L n2H [F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2

PSxx-OMS0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG

PSxx-OMV0008CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -39No.PS-OMV0008CN-E [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -40No.PS-OMV0008CN-E [F10] 42 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT2) (OUT1) [dUAL]2 SET () [LinE] SET () () Line 43 () UP DOWN Line () SET , Line (SET ) SET () [dUAL]2 SET () AbY(Z) 43 () 019 ( ) UP DOWN /() SET 1

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

LV50-OMQ0002

Never mount the product in a place that will be used as a scaffold during piping.

PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

PF-OMM0004_C

3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -13No.PF-OMM0004-D F.S.( 1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 1-5V 1-5V 4-20mA (HYS) ON OFF 90% , () () ,, ,, 10 L/min 10 L ON OFF ON OFF

PF-OMN0011_C

[F 2] OUT2 c()F( oF)() -38No.PF-OMN0011CN-C H_t Ht Ht H_t Ht Ht -39No.PF-OMN0011CN-C [F 3] [F 3] [RES] [F3] 7 s -40No.PF-OMN0011CN-C [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] OUT1 OUT1 OFF [F10] -41No.PF-OMN0011CN-C -42No.PF-OMN0011CN-C -43No.PF-OMN0011CN-C == 1 / ,/ ([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1

LFE-OMY0008

[F 2] OUT2 39 No.LFE*-OMY0008 [F3] [F 3] [RES] [F 3] 40 No.LFE*-OMY0008 [F10] OUT1 (OUT2 ) OUT1 (OUT2 ) () OFF [F10] [SUb] OFF OFF OFF OFF [F10] 41 No.LFE*-OMY0008 (20 L/min ) (=P_1 ) (=N_1 ) (=P1L ) (=P1H ) (=N1L ) (=N1H ) 42 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) 9L3 (1.5S)6 (3S) 9L(9) () + 1 (0) 9L 3 (1.5S)6 (3S) 9L 6 0 [0] () + 1 () (=)(=) 1 / 43 No.LFE*-OMY0008 ( ( ( ( ) )

PFxx-OMO0004CN

[F 2] OUT2 OUT1 -43No.PF-OMO0004CN-E [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -44No.PF-OMO0004CN-E [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 9 L(9.9 ft 3 3 3 50 L 60,008 L 203,481,019 L (57 ) (47 ) ((49 )) -45No.PF-OMO0004CN-E [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -46No.PF-OMO0004CN-E [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20]

PFxx-OMP0001CN

[F 2] OUT2 OUT1 -40No.PF-OMP0001CN-F [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -41No.PF-OMP0001CN-F [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 90 L(9 ft 3 3 3 50 L 60,010 L 203,481,020 L (54 ) (44 ) ((46 )) -42No.PF-OMP0001CN-F [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -43No.PF-OMP0001CN-F [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20][inP] [inP

4-channel Flow Monitor ( compatible)

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

10

Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: None, Voltage: 24 VDC, Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: w/Bracket, Voltage: 24 VDC, Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Body Size: 5000, Thread: Rc, Port Size: 3/4, Option: w/Bracket, Silencer, Voltage: 24 VDC, Lead Wire: Type D, DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Push-turn Locking Slotted Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right