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closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

1

B port C port A port A C B Stroke B A SA + Stroke A SB + Stroke B Z + Stroke (A + B) B A C 4) Cylinder retraction When the air pressure is supplied from the (mm) Bore size SA SB Z 10 31.5 53 112.5 16 33 53 114 port, the rod retracts completely. Stroke B Stroke A Stroke A or Stroke B operation can be made individually. * Dimensions except mentioned above are the same as standard type.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

VFR

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

2

Clearance for maintenance G Drain 2 x P1 (Port size) A C R B Q V IN OUT Panel fitting dimensions Panel fitting dimensions H Y Y W W Pressure gauge (Option) IN IN OUT OUT 2 x P2 Z Z (Pressure gauge port size) Plate thickness AW30-A to AW40-06-A: Max. 8 Plate thickness AW10-A: Max. 3.5 AW20-A: Max. 4 Clearance for maintenance G 2 x P1 (Port size) Drain A Applicable model AW10-A/AW20-A AW20-

Free Mount Cylinder

11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Hydraulic

MA a A MA a Air release R (max.)

Compact Hydraulic Cylinder

28.5 30 32.5 B 9.5 20.5 23.5 25 29 30.5 33 B 6.5 17.5 20.5 22 26 27.5 30 A 23.5 27.5 26.5 34 34 41.5 45 A 28.5 32.5 31.5 39 39 46.5 50 A 20.5 26 25 32.5 32.5 40 43.5 A 23 27 26 33.5 33.5 41 44.5 A 23.5 27.5 26.5 34 34 41.5 45 A 20.5 24.5 23.5 31 31 38.5 42 A 24.5 30 29 36.5 36.5 44 47.5 20 32 40 50 63 80 100 Note) Adjust the auto switch after confirming the operating conditions in the actual

CLQ

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V Approx.

Compact Cylinder with Lock Series CLQ

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V Approx.

Soft Start-up Valve

across flats 19 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 AV5000-m06, 10-5 to 6G(Z)m-A 8 AV2000-A/3000-A/4000-A/5000-A Series Dimensions DIN terminal: AVm00-m-mD/Ymm-m-A Applicable

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

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IN side Straight, Elbow OUT side Straight, Elbow Also available in inch sizes. 14-4-19 2 Compact Manifold Regulator Common Supply Type Series ARM11A How to Order ARM11A 1 A 1 A Z 1 07 1 2 3 4 5 6 7 1. Handle position 2.

CLQ

A A1 E1 L1 Part no.

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT3/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U A B B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U SMC SMC Approx. U B A B A Approx. U D-A73C D-A80C D-J79C D-A7*C,D-A80C Approx. U Approx. U D-A7*C,D-A80C A B A B Approx.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

A

CAT.ES40-39 B Soft Start-up Valve A V2000/3000/4000/5000 New New Series AV5000 introduced!