New

U1 X1 X1 z 11.8 Q F D D z 11.8 Q F 2 x 0.13 Mounting hole 2 x 0.13 Mounting hole Water For Air For Medium R C C R E Vacuum For Oil Construction Dimensions Construction Dimensions E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 0.24 to 0.47 F Q 2 x 0.13 Mounting hole 2 x 0.13 Mounting hole D D S G1/2 Qp0.08 F 1.34 (1.73) 1.24 VX2

VQ5000

U2 U3 U0 U1 U2 D0 D1 D2 D3 D0 D1 D2 12 12 stations F 1 to 12 Manifold is 12 stations max.

VQ4000

R1 port A, B port D side U side P port Port R2 0 A Without SI unit With general type SI unit (Series EX300) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System Electrical entry D side U side IP65 compatible B Cable length 0.6 m Cable length 1.5 m Cable length 3 m U0 U1 U2 D0 D1 D2 Note) Shown VV5Q41-05C12FD0 Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Size: Small Flow Style, Control Valve: Speed Controller, Combination Valve: Stop Valve/Skip Valve, Voltage: 24VDC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: Small Flow Style, Control Valve: Speed Controller, Combination Valve: Stop Valve/Skip Valve, Voltage: 24VDC, Electrical Entry: Grommet, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: Small Flow Style, Control Valve: Speed Controller, Combination Valve: Stop Valve/Skip Valve, Voltage: 100VAC, Electrical Entry: DIN Terminal, Suffix: Valve Single Unit

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: S (Valve Single Unit)

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 100VAC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: Small Flow Style, Control Valve: Speed Controller For Minimal Flow (CCVS Only), Combination Valve: Skip Valve, Voltage: 100VAC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Types: Guide, Maintenance part name: Guide pin assembly, Bore size(ø): -, Compatible air cylinder details: -, Port types: Round/No shim, Applicable hole diameter(ø): 20, Stamped number: 199, Stroke(mm): -, Surface Treatment: -

1

Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. !