Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ 5 5 1 0 5 G Connector kit Enclosure Series Nil Dust proof W5Q55-05042C. 1 set * VQ5150-5G .. 2 sets * VQ5250-5G .. 2 sets * VQ5350-5G . 1 set Manifold base part number 5 VQ5000 W Dust tight, Splash proof (IP65) Valve part number (Stations 1 and 2) Valve part number (Stations 3 and 4) Type of actuation Manual override Valve part number (Station 5) 2 position single 2 position

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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Size: Small Flow Style, Control Valve: Speed Controller, Combination Valve: Stop Valve/Skip Valve, Voltage: 24VDC, Electrical Entry: Grommet, Suffix: Valve Single Unit

Size: Small Flow Style, Control Valve: Speed Controller, Combination Valve: Stop Valve/Skip Valve, Voltage: 24VDC, Electrical Entry: Grommet, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Suffix: S (Valve Single Unit)

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

ZP3

One-touch fitting 04 4 A12 M12 x 1 06 6 U2 For 2 polyurethane tubing1 Barb fitting U4 For 4 soft tubing2 U6 For 6 soft tubing2 Nil Use the connection thread.

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Refer to page 118 for details. 140 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Conduit terminal (U2) E (V2) 34 VX2 VXK 32 25 T VXD VXD VXZ A B M M G1/2 OUT IN VXS J F I 2 x P Port size VXB L K (D) VXE VXP VXR Conduit VXH E U 280 C 23 T VXF VX3 G1/2 B A A B VXA VXD2 C F 3 A OUT IN 3 A Note) Only the

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Table of Contents

U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

MY1

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

Table of Contents

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket