Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 24VDC, Electrical Entry: Grommet, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: G (Grommet), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Types: Guide, Maintenance part name: Guide pin assembly, Bore size(ø): -, Compatible air cylinder details: -, Port types: Round/With shim, Applicable hole diameter(ø): 20, Stamped number: 198, Stroke(mm): -, Surface Treatment: -

1

SY 3 5 1 1 0 0 !0 Manual override q w r e t y u i o !0 !

5

79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 L1 U1 A1 A (mm) Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.

High Vacuum Angle Valve

0 !

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM R1 U1 Applicable bore (mm) 20 25,32 40 50,63 80 100 NDH10 NX U1 L1 A A1 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 34 41 42 56 71 79 8 10 18 22 28 32 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

2

0 !1 q r e w t i y u o !0 !

New

0.21 0 to 430 0 to 3 430 103 to 0.1 to 1/8 3.2 1.12 0.51 0.35 0 to 180 0 to 1.2 1/8, 1/4, 2 VXN24 Atmospheric 430 Atmospheric 3/8 460 5/32 4 1.56 0.57 0.52 0 to 140 0 to 1 pressure pressure 7/32 5.6 2.29 0.55 0.73 0 to 50 0 to 0.35 1/8 3.2 1.19 0.47 0.35 0 to 430 0 to 3 560 1/8, 1/4, 3 VXN34 570 590 5/32 4 1.71 0.50 0.52 0 to 300 0 to 2.1 3/8 7/32 5.6 3.14 0.47 0.88 0 to 130 0 to 0.9 Note

Table of Contents

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

CATALOG

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Brake mechanism added

Applicable bore size d H B C D E1 C H NX B A L1 A1 U1 I-04A 40 69 22 24 55 M14 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-05A 50, 63 74 27 28 60 M18 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-08A 80 91 37 36 71 M22 x 1.5 22.5 26 18+0.070 0 28 0.1 0.3 I-10A 100 105 37 40 83 M26 x 1.5 24.5 28 20+0.084 0 30 0.1 0.3 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With