ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Vacuum Pad

0 0 0 30 10 104 or less 104 or less Volume resistivity (7cm) > 5 > > > > > > > Heat aging > > > > > > > > > > Weather resistance 5 > > > > 5 > > > > Ozone resistance Gas permeability resistance > > /5 /5 /5 /5 > > > > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > >

ZP3

adapter 4 to 8 w q ZP3 Y N B5 B5 04 B r Vacuum inlet Connection thread (Female thread) e B5 M5 x 0.8 Female thread 02 2 One-touch fitting 04 4 U2 For 2 polyurethane tubing Barb fitting U4 For 4 soft tubing 8 B5 M5 x 0.8 8 Model M5 x 0.8 8 0 0.1 M5 x 0.8 Effective thread depth 4 Vacuum inlet direction q Pad dia.

2

0 !1 q r e w t i y u o !0 !

7

A VXD2 Z 1A VXD2 Z 3 0 A A VXK Enter standard product number.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Table of Contents

100 0 VQ014C4 0 1 VQ11 -C6 0 1 3 4 7 VQ214C8 0 1 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ 800 700 600 500 400 300 200 100 0 VQD VQ2149-C8 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected

1

SY 3 5 1 1 0 0 !0 Manual override q w r e t y u i o !0 !

Electric Actuator/Slider Type

0 0 0 0 10 20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 1 2 3 4 5 0 5

Table of Contents

0!2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

MY1

to 5.6 0 to 6 0 to 11.5 0 to 12 0 to 16 0 to 20 0 to 25 20Stroke adjustment range When exceeding the stroke fine adjustment range: Utilize a made-to-order specifications -X416 and -X417.

Series VQ Metal Seal/Rubber Seal Body Ported

Note 3) Consult SMC for the following serial transmission kits; Matsushita Electric Works Ltd., Allen-Bradley Co., Sunx, Fuji Electric company Ltd.,OMRON Corp.. 1.10-28 Plug Lead Unit/Flip Style Body Ported VQ 0/1000/2000 How to Order Valve L 5 C4 VQ 0 1 0 Y 4 Cylinder ports Symbol C3 C4 M5 Port size One-touch fitting for 3.2 One-touch fitting for 4 Series 0 VQ0 Electrical entry Configuration

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 24VDC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160)

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 24VDC, Electrical Entry: Grommet, Suffix: Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160)

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 200VAC, Electrical Entry: Grommet, Suffix: Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160)

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Suffix: U2 (Convertor Unit/forCC100,CC160 (To be Integrated in CCT100,160))