Aluminum High Vacuum Angle Valve

Chemraz CYV VMQ FKM for Plasma ULTIC ARMOR Example) XLGV-40-M9NA-1G-XAN1A U1 UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

New

G 1F 48 VAC G H K L Z NPT 1G 1H 1V 1J 220 VAC 240 VAC DIN terminal ? ? ? ?

Table of Contents

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

CATALOG

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

V

SY114 0.22 0 ~ 0.7 / 0 ~ 101 Large Flow NC SY113A -100KPa~0.6 -100KPa~0 (0.012) Capacity NC SY114A 0.14 0 ~ 0.7 / 0 ~ 101 Standard NO -100KPa~0 -100KPa~0.6 SY123 (0.008) NO SY124 0.22 0 ~ 0.7 / 0 ~ 101 Large Flow NO -100KPa~0 -100KPa~0.6 SY123A (0.012) Capacity NO SY124A Note 1) In case of SY123/4 and SY123/4 A, Supply Air to R Port, P Port will be the Exhaust Port Note 2) Value for DC, add 1g

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Skip Valve, Voltage: 24VDC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 3 (Skip Valve), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Skip Valve, Voltage: 100VAC, Electrical Entry: Grommet, Suffix: Valve Single Unit

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: G (Grommet), Suffix: S (Valve Single Unit)

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: G (Grommet), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Types: Guide, Maintenance part name: Guide pin assembly, Bore size(ø): -, Compatible air cylinder details: -, Port types: Round/With shim, Applicable hole diameter(ø): 20, Stamped number: 198, Stroke(mm): -, Surface Treatment: -

1

Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

5

REC A1 U1 LB A NX Z (MIN) A1 U1 LB A Smooth Smooth (mm) (mm) Part no.

Smooth Cylinder/Low Speed Cylinder

RR1 NDH10 MM NDH10 MM 45 RR1 MM NDH10 E1 NX1 H A NX E1 R2 U1 A1 U1 L1 A NX Z (Min.) A1 U1 L1 A (mm) (mm) A A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 Applicable bore size (mm) 20 25, 32 40 Bore size 20 25, 32 40 Part no.

Brake mechanism added

I Type Single Knuckle Joint Rod End Nut (Standard) 30 30 d d NDH10 NDH10 MM MM RR1 RR1 45 45 30 D D d E1 E1 C C NDH10 MM L1 A1 U1 L1 A1 U1 RR1 45 30 d H NX B H NX B NDH10 A A D E1 C MM RR1 45 Material: Free cutting sulfur steel (mm) Material: Rolled steel (mm) L1 A1 U1 D Part no. Applicable bore size A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)